F16K 2099/0074
Using photolithography
Official title: {using photolithography, e.g. etching}
F16K2099/0074 (Using photolithography) appears on 425 US grants and 372 published applications in this corpus.
Search patents in F16K- Granted patents
- 425
- Published applications
- 372
- Assignees
- 213
- Inventors
- 757
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 3 | 0 |
| 1991 | 6 | 0 |
| 1992 | 5 | 0 |
| 1993 | 11 | 0 |
| 1994 | 7 | 0 |
| 1995 | 7 | 0 |
| 1996 | 5 | 0 |
| 1997 | 6 | 0 |
| 1998 | 3 | 0 |
| 1999 | 11 | 0 |
| 2000 | 18 | 0 |
| 2001 | 14 | 10 |
| 2002 | 21 | 32 |
| 2003 | 19 | 32 |
| 2004 | 25 | 28 |
| 2005 | 16 | 34 |
| 2006 | 32 | 31 |
| 2007 | 21 | 25 |
| 2008 | 12 | 33 |
| 2009 | 9 | 19 |
| 2010 | 19 | 21 |
| 2011 | 15 | 17 |
| 2012 | 23 | 12 |
| 2013 | 18 | 12 |
| 2014 | 17 | 12 |
| 2015 | 12 | 5 |
| 2016 | 4 | 6 |
| 2017 | 7 | 5 |
| 2018 | 7 | 5 |
| 2019 | 6 | 6 |
| 2020 | 4 | 8 |
| 2021 | 6 | 5 |
| 2022 | 5 | 3 |
| 2023 | 4 | 3 |
| 2024 | 4 | 3 |
| 2025 | 5 | 5 |
| 2026 | 3 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Normally-open piezoelectric MEMS valve8 Sep 2026US 12,729,781 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Agricultural sampling system and related methods2 Jun 2026US 12,644,877 B2Precision Planting LLC
- Microelectronic thermal valve17 Mar 2026US 12,578,035 B2Purdue Research Foundation
- Piezo actuator device11 Nov 2025US 12,465,942 B2
- Microchannel valve apparatus, system, and method3 Jun 2025US 12,320,448 B2Microglass LLC
- Normally-open piezoelectric mems valve30 Oct 2025US 2025/0334204 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Electrochemical actuators and actuator arrays28 Aug 2025US 2025/0270988 A1Insulet Corporation
- Normally-open piezoelectric mems valve26 Jun 2025US 2025/0207687 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Selective laser etching of layered fluidistors15 May 2025US 2025/0155982 A1Meta Platforms Technologies, LLC
- Systems and methods for biochemical analysis including a base instrument and a removable cartridge6 Mar 2025US 2025/0073710 A1Illumina, Inc.
Most cited
By later US patents
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002
- Methods and apparatus for analyzing polynucleotide sequences612US 6,818,395 B1California Institute of Technology · 2004
- Methods and apparatus for analyzing polynucleotide sequences567US 6,911,345 B2California Institute of Technology · 2005
- Microscale devices and reactions in microscale devices407US 6,057,149 AUniversity of Michigan · 2000
- Microfluidic analyzer module396US 5,932,799 AYSI Incorporated · 1999