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US 2025/0155982 A1Published application
Selective laser etching of layered fluidistors
AssigneeMeta Platforms Technologies, LLC
InventorsSerol Turkyilmaz, Daniel Myers
Life of this patent
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Abstract
A method includes separately exposing selected portions of a first rigid substrate and a second rigid substrate to laser radiation, selectively etching the exposed portions of the first rigid substrate and the second rigid substrate using a chemical etchant and bonding the first rigid substrate to the second rigid substrate along a common interface to form a fluidic valve. The fluidic valve may be coupled to a fluidic haptics device, for example, which may be integrated into an artificial reality system.
Claims13
A method, comprising:
- providing a plurality of rigid substrates, including a first rigid substrate and a second rigid substrate, wherein the plurality of rigid substrates are at least semi-transparent;
- selectively exposing portions of the first rigid substrate and the second rigid substrate to laser radiation;
- chemically etching the portions of the first rigid substrate and the second rigid substrate that were exposed to the laser radiation;
- and
- bonding the first rigid substrate to the second rigid substrate along a common interface to form a fluidic valve.
2 more elements
Dependencies are inferred from the claim text.