US 12,320,448 B2 · Microchannel valve apparatus, system, and method

Abstract

The present disclosure relates to an apparatus, system and method for a microchannel valve. The valve is configured to control or switch the flow of gasses or liquids. The valve includes a first substrate with a microchannel interrupted by a rotational element having a matching microchannel. The rotational element is attached to a second substrate in contact with the first. Actuation of the valve is achieved by rotating the second substrate relative to the first. The valve may be configured for capillary input and output, and/or for high pressure operation by means of capillary retention features. The valve may be disposed within a subassembly for maintaining contact, axial alignment, and relative rotational alignment between the first and second substrates. The present disclosure also provides a method for fabricating the valve. The present disclosure also provides ways to eliminate gaps between the two substrates.

Claims20

Dependent claims

A glass microchannel valve comprising:

a first substrate with an upper surface defining a plane, said first substrate including a first microchannel disposed below said plane;
and
a rotatable element disposed on a second substrate, said rotatable element intersecting said first microchannel below said plane, said rotatable element including a second microchannel formed therethrough;
wherein rotation of said second substrate induces rotation of said rotatable element such that, in a first operable position, said first microchannel aligns with said second microchannel to allow flow of a fluid therein, and in a second operable position, said first microchannel misaligns with said second microchannel to not allow flow of said fluid therein.

1 more element

A method of manufacturing a glass microchannel valve, the method comprising:

providing a first substrate with an upper surface defining a plane;
irradiating said first substrate with femtosecond laser pulses to define a first microchannel below said plane;
irradiating a rotatable element within said first substrate below said plane, said rotatable element being configured with a second microchannel for fluidly communicating with said first microchannel;
coupling said rotatable element to a second substrate;
etching said first and second substrates until separation is achieved;
and
mating said first and second substrates to form the glass microchannel valve.

4 more elements

Dependencies are inferred from the claim text.

Microchannel valve apparatus, system, and method

Life of this patent

Microchannel valve apparatus, system, and method

Life of this patent

Abstract

Claims20