F16K 2099/0073
Fabrication methods specifically adapted for microvalves
Official title: {Fabrication methods specifically adapted for microvalves}
F16K2099/0073 (Fabrication methods specifically adapted for microvalves) appears on 704 US grants and 702 published applications in this corpus.
Search patents in F16K- Granted patents
- 704
- Published applications
- 702
- Assignees
- 354
- Inventors
- 1,391
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 3 | 0 |
| 1991 | 6 | 0 |
| 1992 | 5 | 0 |
| 1993 | 11 | 0 |
| 1994 | 7 | 0 |
| 1995 | 7 | 0 |
| 1996 | 6 | 0 |
| 1997 | 7 | 0 |
| 1998 | 3 | 0 |
| 1999 | 13 | 0 |
| 2000 | 20 | 0 |
| 2001 | 17 | 11 |
| 2002 | 28 | 51 |
| 2003 | 31 | 46 |
| 2004 | 39 | 37 |
| 2005 | 24 | 49 |
| 2006 | 47 | 45 |
| 2007 | 27 | 38 |
| 2008 | 13 | 57 |
| 2009 | 16 | 38 |
| 2010 | 24 | 41 |
| 2011 | 32 | 40 |
| 2012 | 37 | 24 |
| 2013 | 35 | 34 |
| 2014 | 36 | 31 |
| 2015 | 25 | 21 |
| 2016 | 21 | 21 |
| 2017 | 18 | 14 |
| 2018 | 16 | 18 |
| 2019 | 24 | 14 |
| 2020 | 16 | 18 |
| 2021 | 12 | 13 |
| 2022 | 14 | 7 |
| 2023 | 15 | 11 |
| 2024 | 15 | 12 |
| 2025 | 13 | 11 |
| 2026 | 6 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Normally-open piezoelectric MEMS valve8 Sep 2026US 12,729,781 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Microfluidic valve, method for its manufacture, and uses thereof28 Jul 2026US 12,692,848 B2Consejo Superior De Investigaciones Cientificas (Csic)
- Agricultural sampling system and related methods2 Jun 2026US 12,644,877 B2Precision Planting LLC
- Microfluidic component with metal layer stack and fluid conduit element made of another material bonded with it5 May 2026US 12,618,491 B2Agilent Technologies, Inc.
- Microelectronic thermal valve17 Mar 2026US 12,578,035 B2Purdue Research Foundation
- Normally-open piezoelectric mems valve30 Oct 2025US 2025/0334204 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Microfluidic valve and method of making same11 Sep 2025US 2025/0281928 A1HandyLab, Inc.
- Electrochemical actuators and actuator arrays28 Aug 2025US 2025/0270988 A1Insulet Corporation
- Modular microvalves for microfluidic devices and methods of using the same31 Jul 2025US 2025/0242346 A1Redbud Labs, Inc.
- Normally-open piezoelectric mems valve26 Jun 2025US 2025/0207687 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002
- Methods and apparatus for analyzing polynucleotide sequences612US 6,818,395 B1California Institute of Technology · 2004
- Methods and apparatus for analyzing polynucleotide sequences567US 6,911,345 B2California Institute of Technology · 2005
- Microscale devices and reactions in microscale devices407US 6,057,149 AUniversity of Michigan · 2000
- Microfluidic analyzer module396US 5,932,799 AYSI Incorporated · 1999