F04B 37/085
Regeneration of cryo-pumps
Official title: {Regeneration of cryo-pumps}
F04B37/085 (Regeneration of cryo-pumps) appears on 57 US grants and 70 published applications in this corpus.
Search patents in F04B- Granted patents
- 57
- Published applications
- 70
- Assignees
- 25
- Inventors
- 105
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 3 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 2 |
| 2006 | 0 | 0 |
| 2007 | 0 | 1 |
| 2008 | 2 | 2 |
| 2009 | 0 | 2 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 1 | 2 |
| 2013 | 0 | 3 |
| 2014 | 0 | 7 |
| 2015 | 1 | 2 |
| 2016 | 1 | 5 |
| 2017 | 4 | 7 |
| 2018 | 8 | 1 |
| 2019 | 6 | 4 |
| 2020 | 2 | 3 |
| 2021 | 4 | 4 |
| 2022 | 3 | 5 |
| 2023 | 4 | 4 |
| 2024 | 7 | 5 |
| 2025 | 1 | 7 |
| 2026 | 2 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Cryopump, cryopump system, and cryopump regeneration method28 Jul 2026US 12,692,851 B2Sumitomo Heavy Industries, Ltd.
- Cryopump and cryopump regeneration method19 May 2026US 12,631,168 B2Sumitomo Heavy Industries, Ltd.
- Cryopump9 Dec 2025US 12,492,847 B2Sumitomo Heavy Industries, Ltd.
- Cryopump19 Nov 2024US 12,146,480 B2Edwards Vacuum LLC
- Cryopanel structure for a cryopump12 Nov 2024US 12,140,130 B2Edwards Vacuum LLC
- Thermal pump with heat-exchanging displacer30 Jul 2026US 2026/0218694 A1KLA Corporation
- Protective coatings for cryogenic pump components in process chambers29 Jan 2026US 2026/0028975 A1APPLIED Materials.Inc.
- Method for regenerating cryopump17 Jul 2025US 2025/0230805 A1Cryo H&I, Inc
- Cryopump system26 Jun 2025US 2025/0207573 A1Cryo H&I, Inc
- Cryopump12 Jun 2025US 2025/0188916 A1Sumitomo Heavy Industries, Ltd.
Most cited
By later US patents
- Shield to prevent cryopump charcoal array from shedding during cryo-regeneration135US 6,122,921 AAPPLIED Materials.Inc. · 2000
- Cryopump72US 5,582,017 AEbara Corporation · 1996
- Method and apparatus for cryopump regeneration using turbomolecular pump48US 5,513,499 AEbara Technologies Incorporated · 1996
- Hydraulic drive system for cryogenic pump34US 9,915,250 B2Caterpillar Inc. · 2018
- Pressure controlled cryopump regeneration method and system25US 5,517,823 AHelix Technology Corporation · 1996