Method and apparatus for cryopump regeneration using turbomolecular pump

Apparatus for vacuum pumping an enclosed chamber comprising:

• a cryogenic pumping device having first and second stage cryoarrays and a refrigerator for cooling said first and second cryoarrays during an operating cycle, said pumping device adapted to be in fluid communication with the chamber for removing gases from the chamber during said operating cycle;
• and
• a turbomolecular pump for intermittent operation during removal of gases from said second stage and for simultaneous connection into fluid communication with the cryogenic pumping device for pumping gas liberated from said second stage cryoarray during a partial regeneration cycle in which said second stage cryoarray is maintained within a partial regeneration temperature range selected to liberate captured gas from said second stage cryoarray and to retain in a frozen condition condensed water vapor on said first stage cryoarray.

Apparatus for vacuum pumping comprising:

• a plurality of cryogenic pumping devices, each including first and second stage cryoarrays and a refrigerator for cooling said first and second cryoarrays, each of said cryogenic pumping devices adapted to be in fluid communication with an enclosed chamber for removing gases during an operating cycle;
• and
• a turbomolecular pump for intermittent operation during removal of gases from said second stages and for connection into fluid communication with each of said cryogenic pumping devices for pumping gas liberated from said second stage cryoarray during a partial regeneration cycle in which said second stage cryoarray is maintained within a partial regeneration temperature range selected to liberate captured gas from said second stage cryoarray and to retain in a frozen condition condensed water vapor on said first stage cryoarray.

A method for partial regeneration of a plurality of cryogenic pumping devices, each of which includes first and second stage cryoarrays and a refrigerator for cooling said first and second stage cryoarrays, said method comprising the steps of:

• heating the second stage cryoarray of each of said cryogenic pumping devices from its operating temperature to a partial regeneration temperature range selected to liberate captured gas from the second stage cryoarray and to retain in a frozen condition condensed water vapor on the first stage cryoarray;
• and
• when the second stage cryoarray of each of said cryogenic pumping devices has a temperature within said partial regeneration temperature range, pumping gas liberated from the second stage cryoarray with a turbomolecular pump adapted to periodically operate and periodically be placed into fluid communication with each of said cryogenic pumping devices during said period said pumping devices are in said partial regeneration temperature range.