Cryopump

A cryopump comprising:

• a cryopump container that defines a cryopump intake port;
• a cryocooler that is installed in the cryopump container and includes a first cooling stage and a second cooling stage that is cooled to a lower temperature than the first cooling stage;
• a radiation shield that is thermally coupled to the first cooling stage and extends in an axial direction from the cryopump intake port into the cryopump container;
• an intake port plate that is thermally coupled to the first cooling stage and extends along a plane perpendicular to the axial direction in the cryopump intake port, and in which a gas inlet is formed between the intake port plate and the radiation shield;
• a cryopanel unit that is thermally coupled to the second cooling stage and is disposed inside the radiation shield, and in which a frost accommodation space is formed between the cryopanel unit and the intake port plate;
• and
• a skirt that is thermally coupled to the first cooling stage and extends from an outer periphery of the intake port plate into the radiation shield, and in which a gas flow path connecting the gas inlet to the frost accommodation space is formed between the skirt and the radiation shield.