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US 12,631,168 B2Granted
Cryopump and cryopump regeneration method
AssigneeSumitomo Heavy Industries, Ltd.
InventorKakeru Takahashi
Life of this patent
Estimating the term…
Abstract
A cryopump regeneration method includes: supplying diluent gas to a cryopump in the middle of a cooling operation; accumulating the diluent gas on a cryogenic surface in the cryopump; revaporizing another gas trapped on the cryogenic surface together with the diluent gas; and exhausting mixed gas of the revaporized gas and the diluent gas from the cryopump. The diluent gas may be purge gas.
Claims8
A cryopump comprising:
- a cryopump container;
- a cryopanel disposed in the cryopump container;
- a cryocooler provided in the cryopump container and thermally coupled to the cryopanel, the cryocooler configured to perform a cooling operation to cool the cryopanel to a cryogenic temperature at which purge gas is condensed on the cryopanel;
- a body purge valve configured to supply the purge gas to the cryopump container;
- and
- a regeneration controller configured to control the body purge valve such that the purge gas is supplied to the cryopump container and condensed on the cryopanel in a middle of the cooling operation of the cryocooler where the cryopanel is cooled.
3 more elements
A cryopump regeneration method comprising:
- performing a cooling operation of a cryocooler of a cryopump to cool a cryogenic surface in the cryopump to a cryogenic temperature at which diluent gas is condensed on the cryogenic surface;
- supplying the diluent gas to the cryopump in a middle of the cooling operation of the cryocooler of the cryopump;
- accumulating the diluent gas on the cryogenic surface in the cryopump;
- revaporizing another gas trapped on the cryogenic surface together with the diluent gas;
- and
- exhausting mixed gas of the revaporized gas and the diluent gas from the cryopump.
3 more elements
Dependencies are inferred from the claim text.