Cryopanel structure for a cryopump
AssigneeEdwards Vacuum LLC
InventorGerald Szarek
Life of this patent
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Abstract
A cryopump comprising: a pump inlet, a two stage refrigerator; a first stage array thermally coupled to a first stage of said two stage refrigerator; and a cryopanel structure coupled to a second stage of said two stage refrigerator is disclosed. The cryopanel structure comprises at least three flat panels. The first stage array is mounted between the pump inlet and the cryopanel structure, and comprises a plurality of slats, the plurality of slats each being mounted such that a side of each of the plurality of slats closest to the cryopanel structure is substantially aligned and offset longitudinally with respect to a corresponding one of said at least three flat panels.
Claims16
A cryopump comprising:
- a pump inlet;
- a two stage refrigerator;
- a first stage array thermally coupled to a first stage of said two stage refrigerator;
- and
- a cryopanel structure coupled to a second stage of said two stage refrigerator;
- wherein
- said cryopanel structure comprises at least three flat panels;
- said first stage array being mounted between said pump inlet and said cryopanel structure, and comprising a plurality of slats, said plurality of slats each being mounted such that a respective edge of each of said plurality of slats closest to said cryopanel structure extends along a first line and is offset longitudinally with respect to a top edge of a corresponding one of said at least three flat panels, wherein the top edge extends along a second line that is parallel to the first line.
The cryopump according to 5, wherein said plurality of slats are mounted such that at least some of said slats shield one surface of an adjacent flat panel of said cryopanel structure from gas molecules entering said pump through said pump inlet, said coated surface being said surface shielded by an adjacent one of said plurality of slats.
Dependencies are inferred from the claim text.