Cryopump

A cryopump comprising:

• a cryopump container comprising a container body and a cryocooler accommodation cylinder, the container body comprising a cryopump intake port, whose pathway extends in an axial direction of the container body, the cryocooler accommodation cylinder connected to a side portion of the container body and extending in a transverse direction perpendicular to the axial direction of the container body;
• a cryocooler fixed to the cryocooler accommodation cylinder and extending in the transverse direction within the cryopump container, the cryocooler comprising a first cooling stage and a second cooling stage that is cooled to a lower temperature than the first cooling stage;
• a plurality of cryopanels thermally coupled to the second cooling stage, each configured to adsorb a non-condensable gas and comprising a distal portion away from the second cooling stage, wherein the plurality of cryopanels are axially arranged between the cryopump intake port and a bottom portion of the container body, or wherein the plurality of cryopanels are radially arranged when viewed from the cryopump intake port;
• and
• a purge gas inlet installed in the container body at a position below the cryocooler accommodation cylinder so as to blow a purge gas from the purge gas inlet to the distal portion of at least one of the cryopanels,
• wherein the plurality of cryopanels are radially arranged when viewed from the cryopump intake port, each of the cryopanels axially extends from upward to downward with respect to the second cooling stage;
• and
• the purge gas inlet is installed in the side portion of the container body at an axial height aligned with a lower portion of the cryopanel disposed between the second cooling stage and the bottom portion of the container body.

A cryopump comprising:

• a cryopump container comprising a container body and a cryocooler accommodation cylinder, the container body comprising a cryopump intake port, whose pathway extends in an axial direction of the container body, the cryocooler accommodation cylinder connected to a side portion of the container body and extending in a transverse direction perpendicular to the axial direction of the container body;
• a cryocooler fixed to the cryocooler accommodation cylinder and extending in the transverse direction within the cryopump container, the cryocooler comprising a first cooling stage and a second cooling stage that is cooled to a lower temperature than the first cooling stage;
• a plurality of cryopanels thermally coupled to the second cooling stage, each configured to adsorb a non-condensable gas and comprising a distal portion away from the second cooling stage, wherein the plurality of cryopanels are axially arranged between the cryopump intake port and a bottom portion of the container body, or wherein the plurality of cryopanels are radially arranged when viewed from the cryopump intake port;
• a purge gas inlet installed in the container body at a position below the cryocooler accommodation cylinder so as to blow a purge gas from the purge gas inlet to the distal portion of at least one of the cryopanels;
• and
• a radiation shield disposed around the plurality of cryopanels within the container body and thermally coupled to the first cooling stage,
• wherein the purge gas inlet comprises a purge valve installed in the container body at a position below the cryocooler accommodation cylinder to connect the cryopump container to a purge gas source, and
• the radiation shield is provided with an opening portion through which a purge gas that is ejected from the purge valve into the cryopump container passes into the radiation shield, the opening portion located below the cryocooler accommodation cylinder.