C30B 35/005
Transport systems
Official title: {Transport systems}
C30B35/005 (Transport systems) appears on 106 US grants and 98 published applications in this corpus.
Search patents in C30B- Granted patents
- 106
- Published applications
- 98
- Assignees
- 73
- Inventors
- 297
- Latest grant
- 12 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 3 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 5 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 3 | 0 |
| 1994 | 3 | 0 |
| 1995 | 5 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 3 | 1 |
| 2002 | 2 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 1 |
| 2007 | 1 | 2 |
| 2008 | 0 | 1 |
| 2009 | 1 | 4 |
| 2010 | 1 | 4 |
| 2011 | 1 | 9 |
| 2012 | 2 | 4 |
| 2013 | 4 | 0 |
| 2014 | 2 | 4 |
| 2015 | 2 | 2 |
| 2016 | 3 | 4 |
| 2017 | 0 | 0 |
| 2018 | 2 | 7 |
| 2019 | 3 | 2 |
| 2020 | 5 | 4 |
| 2021 | 2 | 4 |
| 2022 | 4 | 9 |
| 2023 | 6 | 11 |
| 2024 | 6 | 11 |
| 2025 | 5 | 8 |
| 2026 | 8 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus and system for substrate processing12 May 2026US 12,628,600 B2APPLIED Materials.Inc.
- Molecular beam epitaxy thin film growth apparatus17 Mar 2026US 12,577,654 B2University of Ulsan Foundation for Industry Cooperation
- Apparatus and methods for reducing substrate cool down time27 Jan 2026US 12,534,823 B2APPLIED Materials.Inc.
- Integrated wet clean for epitaxial growth27 Jan 2026US 12,538,737 B2APPLIED Materials.Inc.
- Treating arrangement with transfer chamber and epitaxial reactor13 Jan 2026US 12,522,947 B2Lpe S.P.A.
- Ingot puller apparatus including automated clamp28 May 2026US 2026/0146358 A1GlobalWafers Co., Ltd.
- Integrated wet clean for epitaxial growth14 May 2026US 2026/0136875 A1APPLIED Materials.Inc.
- Methods for crystal growth by replacing a sublimated target source material with a candidate source material9 Apr 2026US 2026/0098356 A1Meishan Boya Advanced Materials Co., Ltd.
- Method for manufacturing epitaxial wafer15 Jan 2026US 2026/0015765 A1Sumco Corporation
- Ultraviolet (uv) treatment chamber for low temperature epitaxial growth18 Dec 2025US 2025/0385089 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Transfer apparatus492US 4,466,766 ARuska Instrument Corporation · 1984
- Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate383US 5,443,648 ATokyo Electron Limited · 1995
- High throughput multi-wafer epitaxial reactor344US 9,920,451 B2Crystal Solar, Inc. · 2018
- Processing apparatus and method104US 4,911,103 ATexas Instruments Incorporated · 1990
- Method for multichamber sheet-after-sheet type treatment84US 5,445,491 AToshiba Kikai Kabushiki Kaisha · 1995