C30B 31/106
Continuous processes
Official title: {Continuous processes}
C30B31/106 (Continuous processes) appears on 4 US grants and 0 published applications in this corpus.
Search patents in C30B- Granted patents
- 4
- Published applications
- 0
- Assignees
- 3
- Inventors
- 14
- Latest grant
- 28 Jun 1994
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 2 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Transport system, in particular for transporting silicon monocrystals through the tank of a research reactor28 Jun 1994US 5,324,331 A
- Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates3 Apr 1979US 4,147,432 ANippondenso Co., Ltd.
- Apparatus for heat treating semiconductor wafers4 Jul 1978US 4,098,223 ASiemens Aktiengesellschaft
- Apparatus for thermal diffusion of semiconductor devices28 Feb 1978US 4,075,972 ANippondenso Co., Ltd.
No published applications in this class yet.
Most cited
By later US patents
- Apparatus for heat treating semiconductor wafers13US 4,098,223 ASiemens Aktiengesellschaft · 1978
- Apparatus for thermal diffusion of semiconductor devices12US 4,075,972 ANippondenso Co., Ltd. · 1978
- Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates8US 4,147,432 ANippondenso Co., Ltd. · 1979