B65G 49/07
For semiconductor wafers not used, see h10p72/00
Official title: for semiconductor wafers {Not used, see H10P72/00}(specially adapted for conveying of semiconductor wafers during manufacture or treatment of semiconductor or electric solid state devices or components H10P72/00)
B65G49/07 (For semiconductor wafers not used, see h10p72/00) appears on 43 US grants and 62 published applications in this corpus.
Search patents in B65G- Granted patents
- 43
- Published applications
- 62
- Assignees
- 31
- Inventors
- 143
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 2 |
| 2013 | 0 | 1 |
| 2014 | 1 | 3 |
| 2015 | 3 | 0 |
| 2016 | 2 | 0 |
| 2017 | 0 | 1 |
| 2018 | 1 | 4 |
| 2019 | 3 | 12 |
| 2020 | 7 | 8 |
| 2021 | 5 | 5 |
| 2022 | 5 | 4 |
| 2023 | 3 | 4 |
| 2024 | 2 | 7 |
| 2025 | 6 | 7 |
| 2026 | 4 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Substrate holding hand and substrate conveying robot11 Aug 2026US 12,703,106 B2Kawasaki Jukogyo Kabushiki Kaisha
- Overhead conveying vehicle7 Jul 2026US 12,673,817 B2Murata Machinery, Ltd.
- Transfer chamber7 Jul 2026US 12,677,625 B2Sinfonia Technology Co., Ltd.
- Ceiling storage system and control method thereof10 Mar 2026US 12,570,467 B2Samsung Electronics Co., Ltd.
- Overhead conveying vehicle2 Sep 2025US 12,406,868 B2Murata Machinery, Ltd.
- Transporter and connection method30 Jul 2026US 2026/0223629 A1Tokyo Electron Limited
- Wafer transfer device, wafer loading and unloading device, and control method thereof18 Jun 2026US 2026/0167437 A1Semight Instruments Co., Ltd
- Substrate processing apparatus and transfer method12 Mar 2026US 2026/0076144 A1Tokyo Electron Limited
- Substrate processing apparatus1 Jan 2026US 2026/0005052 A1SCREEN Holdings Co., Ltd.
- Automated material handling system (amhs) rail methodology2 Oct 2025US 2025/0304380 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Robot apparatus and treating apparatus42US 6,045,315 AKabushiki Kaisha Toshiba · 2000
- Transfer chamber7US 10,672,632 B2Sinfonia Technology Co., Ltd. · 2020
- Baffle plate3US 10,643,881 B2Harmotec Co., Ltd. · 2020
- Robot diagnosing method2US 10,020,216 B1Kawasaki Jukogyo Kabushiki Kaisha · 2018
- Conveyance system2US 10,717,605 B2Disco Corporation · 2020