Robot apparatus and treating apparatus
AssigneesShibaura Engineering Works Co., Ltd., Kabushiki Kaisha Toshiba
InventorsHidehito Azumano, Atsushi Kinase, Kimio Kogure, Hisataka Komatsu
Life of this patent
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Abstract
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm member. A pair of fingers, used for conveying a work, are attached to the respective rotatable pulleys. A driving force transmission member is engaged with the stationary pulley and the rotatable pulleys. When the arm member is rotated, the driving force transmitting means rotates the rotatable pulleys in accordance with the outer diameter ratio of the stationary pulley to the rotatable pulleys.
Claims6
A treating apparatus for treating a work in a vacuum state, comprising:
- a transfer chamber having one side in which a plurality of first transfer ports are formed side by side;
- a plurality of treatment chambers connected to the first transfer ports, respectively, and arranged side by side;
- transfer tables arranged inside the transfer chamber and located at positions opposed to the respective first transfer ports, said transfer tables receiving untreated works externally supplied thereto and also receiving works that have been treated in the respective treatment chambers;
- and
- a first robot apparatus provided between each of the transfer tables and a corresponding one of the treatment chambers so as to transfer a work therebetween.
Dependencies are inferred from the claim text.