Substrate processing apparatus and transfer method

A transfer method of transferring a first cassette to a substrate processing apparatus,

• wherein the substrate processing apparatus comprises:
• at least one transfer block configured to transfer a substrate to be processed in an interior of the at least one transfer block;
• at least one substrate processing module configured to perform processing on the substrate;
• and
• a cassette transfer mechanism configured to transfer the first cassette between a delivery position set on an outer surface of the substrate processing apparatus and a loading/unloading position at which the first cassette is loaded into and unloaded from an interior of the substrate processing apparatus, and
• wherein the transfer method comprising:
• delivering the first cassette, which is transferred from an outside of the substrate processing apparatus, to the cassette transfer mechanism at the delivery position;
• moving the cassette transfer mechanism from the delivery position to the loading/unloading position;
• and
• delivering the substrate accommodated in the first cassette to the substrate processing apparatus at the loading/unloading position.