Substrate holding hand and substrate conveying robot

A substrate holding hand comprising:

• a blade including a support to support a substrate;
• a movable pressing unit including a pressing member that moves back and forth to press the substrate;
• and
• an inclination adjusting mechanism operable to adjust an inclination of the pressing member,
• wherein
• the inclination adjusting mechanism is operable to adjust the inclination of the pressing member by rotating the pressing member about a predetermined rotation axis;
• the inclination adjusting mechanism includes an inclination adjusting pin to support the pressing member such that the pressing member is rotatable about the predetermined rotation axis, and is operable to adjust the inclination of the pressing member by rotating the pressing member about the predetermined rotation axis with the inclination adjusting pin as a center of rotation;
• the inclination adjusting pin includes a second inclination adjusting pin extending in a direction parallel to a main surface of the blade and perpendicular to a direction in which the movable pressing unit moves back and forth;
• and
• the inclination adjusting mechanism is operable to adjust the inclination of the pressing member in a plane perpendicular to the main surface of the blade by rotating the pressing member about a rotation axis extending in the direction parallel to the main surface of the blade and perpendicular to the direction in which the movable pressing unit moves back and forth with the second inclination adjusting pin as the center of rotation.

A substrate holding hand comprising:

• a blade including a support to support a substrate;
• a movable pressing unit including a pressing member that moves back and forth to press the substrate;
• an inclination adjusting mechanism operable to adjust an inclination of the pressing member;
• and
• a movable support unit including a support member that moves back and forth to support the substrate,
• wherein
• the support member includes a plurality of support members aligned in a direction perpendicular to a main surface of the blade to support a plurality of the substrates aligned in the direction perpendicular to the main surface of the blade;
• among the plurality of support members of the movable support unit, an intermediate support member is replaceable while an end support member in the direction perpendicular to the main surface of the blade is attached;
• the movable support unit further includes a plurality of mounting members to allow the support members to be mounted thereto;
• the mounting member of the intermediate support member is fixed to the mounting member of the end support member by a fastening member;
• and
• the intermediate support member of the movable support unit is replaceable while the end support member is attached by removing the fastening member to remove the mounting member of the intermediate support member from the mounting member of the end support member.