B23B 31/307
Vacuum chucks
Official title: {Vacuum chucks}
B23B31/307 (Vacuum chucks) appears on 62 US grants and 53 published applications in this corpus.
Search patents in B23B- Granted patents
- 62
- Published applications
- 53
- Assignees
- 48
- Inventors
- 129
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 3 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 3 |
| 2004 | 2 | 0 |
| 2005 | 0 | 0 |
| 2006 | 1 | 1 |
| 2007 | 0 | 1 |
| 2008 | 4 | 1 |
| 2009 | 0 | 1 |
| 2010 | 2 | 1 |
| 2011 | 1 | 1 |
| 2012 | 0 | 0 |
| 2013 | 0 | 2 |
| 2014 | 0 | 2 |
| 2015 | 2 | 7 |
| 2016 | 3 | 2 |
| 2017 | 5 | 2 |
| 2018 | 5 | 11 |
| 2019 | 5 | 2 |
| 2020 | 8 | 2 |
| 2021 | 1 | 4 |
| 2022 | 2 | 3 |
| 2023 | 4 | 2 |
| 2024 | 2 | 4 |
| 2025 | 0 | 1 |
| 2026 | 3 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Gripping device for holding, centring and/or collet-clamping a micromechanical or horological component7 Jul 2026US 12,673,373 B2ETA SA Manufacture Horlogere Suisse
- Gripping device for holding, centring and/or collet-clamping a micromechanical or horological component, and associated attachment method31 Mar 2026US 12,589,440 B2ETA SA Manufacture Horlogere Suisse
- Gripper device for maintaining, centring, and/or clamping a micromechanical or horological component, and associated fastening method17 Feb 2026US 12,554,228 B2ETA SA Manufacture Horlogere Suisse
- Planarization process, apparatus and method of manufacturing an article12 Nov 2024US 12,138,747 B2Canon Kabushiki Kaisha
- Laser processing apparatus26 Mar 2024US 11,938,570 B2Disco Corporation
- Chuck for acquiring a warped workpiece20 Mar 2025US 2025/0096021 A1Core Flow Ltd.
- Gripping device for holding, centring and/or collet-clamping a micromechanical or horological component23 May 2024US 2024/0165714 A1ETA SA Manufacture Horlogere Suisse
- Gripping device for holding, centring and/or collet-clamping a micromechanical or horological component, and associated attachment method23 May 2024US 2024/0165715 A1ETA SA Manufacture Horlogere Suisse
- Gripper device for maintaining, centring, and/or clamping a micromechanical or horological component, and associated fastening method23 May 2024US 2024/0168441 A1ETA SA Manufacture Horlogere Suisse
- Expander unit with magnetic spring for a split stirling cryogenic refrigeration device18 Apr 2024US 2024/0128118 A1Cryo Tech Ltd.
Most cited
By later US patents
- Wafer-handling apparatus having a resilient membrane which holds wafer when a vacuum is applied197US 5,423,716 A1995
- Apparatus and method for handling fragile semiconductor wafers51US 5,273,615 AMotorola, Inc. · 1993
- Rotary vacuum-chuck using no rotary union47US 4,183,545 AAdvanced Simiconductor Materials/America · 1980
- Spinner chuck46US 4,603,867 AMotorola, Inc. · 1986
- End effector23US 5,427,363 ACNA Manufacturing Systems, Inc. · 1995