Planarization process, apparatus and method of manufacturing an article
AssigneeCanon Kabushiki Kaisha
InventorsByung-Jin Choi, Ozkan Ozturk, Masaki Saito, Seth J. Bamesberger
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Abstract
A planarization apparatus comprising a superstrate chuck is provided. The superstrate includes a plurality of inner lands protruding from a surface of the superstrate chuck and a peripheral land protruding from the surface of the superstrate chuck along a periphery of the superstrate chuck and encircling the inner lands therein. The peripheral land has a height smaller than a height of each of the inner lands. The peripheral land has a width sufficiently larger than a width of each of the inner lands such that a pressure leakage through the peripheral land is controlled to be less than a threshold.
Claims7
A planarization apparatus, comprising:
- a superstrate chuck, comprising:
- one or more inner lands protruding from a surface of the superstrate chuck;
- and
- a peripheral land protruding from the surface of the superstrate chuck along a periphery of the superstrate chuck and encircling the inner lands therein, wherein:
- the peripheral land has a height smaller than a height of each of the inner lands;
- and
- the peripheral land has a width larger than a width of each of the inner lands,
- wherein a surface of the peripheral land distal to the surface of the superstrate chuck has a multi-step structure, and
- wherein the peripheral land includes a highest step at an outer edge and a lowest step between the outer edge and an inner edge of the peripheral land.
Dependencies are inferred from the claim text.