Y10T 74/20354
Planar surface with orthogonal movement only
Y10T74/20354 (Planar surface with orthogonal movement only) appears on 147 US grants and 81 published applications in this corpus.
Search patents in Y10T- Granted patents
- 147
- Published applications
- 81
- Assignees
- 100
- Inventors
- 231
- Latest grant
- 12 Nov 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 3 | 0 |
| 1994 | 10 | 0 |
| 1995 | 7 | 0 |
| 1996 | 7 | 0 |
| 1997 | 5 | 0 |
| 1998 | 8 | 0 |
| 1999 | 6 | 0 |
| 2000 | 6 | 0 |
| 2001 | 5 | 0 |
| 2002 | 3 | 4 |
| 2003 | 2 | 4 |
| 2004 | 6 | 10 |
| 2005 | 2 | 7 |
| 2006 | 5 | 7 |
| 2007 | 8 | 7 |
| 2008 | 8 | 3 |
| 2009 | 7 | 7 |
| 2010 | 0 | 5 |
| 2011 | 9 | 10 |
| 2012 | 3 | 2 |
| 2013 | 8 | 4 |
| 2014 | 7 | 4 |
| 2015 | 2 | 2 |
| 2016 | 1 | 2 |
| 2017 | 2 | 1 |
| 2018 | 1 | 0 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 1 | 1 |
| 2023 | 0 | 0 |
| 2024 | 2 | 0 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Positioning system12 Nov 2024US 12,138,787 B2
- Large-stroke air flotation type nano-positioning platform24 Sep 2024US 12,098,749 B1Wuxi Xivi Science and Technology Co., Ltd.
- Positioning system17 May 2022US 11,331,789 B2
- Mass transfer tool manipulator assembly with remote center of compliance22 Jan 2019US 10,183,396 B2Apple Inc.
- Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method17 Apr 2018US 9,946,171 B2Nikon Corporation
- Moving platform11 Dec 2025US 2025/0375844 A1Delta Electronics, Inc.
- Positioning System13 Oct 2022US 2022/0324096 A1
- Mass transfer tool manipulator assembly with remote center of compliance16 Mar 2017US 2017/0072559 A1Apple Inc.
- Microelectromechanical (mems) manipulators for control of nanoparticle coupling interactions11 Aug 2016US 2016/0233791 A1Uchicago Argonne, LLC
- Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method7 Jan 2016US 2016/0004169 A1Nikon Corporation
Most cited
By later US patents
- Precision motion stage with single guide beam and follower stage461US 5,623,853 ANikon Precision Inc. · 1997
- Movement guiding mechanism118US 5,040,431 ACanon Kabushiki Kaisha · 1991
- Apparatus for precisely moving a table104US 4,409,860 AHitachi, Ltd. · 1983
- Linear actuator mechanism60US 5,836,205 A1998
- Fine-adjusting device for accurate positioning an adjusting element57US 4,691,586 AStaat der Nederlanden (Staatsbedrijf der Posterijen, Telegrafie en Telfonie) · 1987