Mass transfer tool manipulator assembly with remote center of compliance
AssigneeApple Inc.
InventorsPaul Argus Parks, Nile Alexander Light, Stephen P. Bathurst, John A. Higginson, Andreas Bibl
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Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
Claims20
A remote center robot, comprising:
- a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm;
- a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis.
A method, comprising:
- moving a remote center robot along a z-axis, wherein the remote center robot includes a first linkage coupled with a first actuator and a second linkage coupled with a second actuator, wherein the first linkage has a first upper joint and a first lower joint separated along a first axis, wherein the second linkage is mounted on the first linkage and has a second upper joint and a second lower joint separated along a second axis, and wherein the first axis and the second axis intersect at a remote rotational center on the z-axis;
- receiving a signal from one or more of a tip sensor or a tilt sensor mounted on a micro pick up array mount, wherein the micro pick up array mount is coupled with the second linkage;
- and
- actuating, in response to the signal, at least one of the first actuator or the second actuator to rotate one or more of a first coupler link of the first linkage or a second coupler link of the second linkage about the remote rotational center.
Dependencies are inferred from the claim text.