Mass transfer tool manipulator assembly with remote center of compliance
AssigneeApple Inc.
InventorsPaul Argus Parks, Nile Alexander Light, Stephen P. Bathurst, John A. Higginson, Andreas Bibl
Life of this patent
Estimating the term…
Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
Claims16
A remote center robot, comprising:
- a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm;
- a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis;
- wherein the first axis and the z-axis extend within a first plane, and wherein the second axis and the z-axis extend within a second plane, and wherein the first plane is offset from the second plane by an angle;
- and
- a first linear actuator having a first end fixed relative to the first upper joint, wherein actuation of the first linear actuator changes a first angle between the first axis and the z-axis.
A remote center robot, comprising:
- a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm;
- a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis;
- a z-flexure including an upper mount coupled with a bottom portion of the second linkage and a lower mount, such that the remote rotational center is below the lower mount;
- a distribution plate coupled with the lower mount of the z-flexure;
- and
- an insulator between the lower mount and the z-flexure.
A remote center robot, comprising:
- a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm;
- and
- a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis;
- wherein the first and second upper joints and the first and second lower joints include a plurality of living hinges;
- wherein a first combined stiffness of the first linkage is equal to a second combined stiffness of the second linkage.
Dependencies are inferred from the claim text.