Y10S 148/128
Proton bombardment of silicon
Y10S148/128 (Proton bombardment of silicon) appears on 27 US grants and 0 published applications in this corpus.
Search patents in Y10S- Granted patents
- 27
- Published applications
- 0
- Assignees
- 19
- Inventors
- 56
- Latest grant
- 28 Dec 2004
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 3 | 0 |
| 1980 | 2 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 4 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 3 | 0 |
| 1994 | 4 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Closely-spaced VCSEL and photodetector for applications requiring their independent operation28 Dec 2004US 6,835,992 B1Optical Communication Products, Inc.
- Method for making closely-spaced VCSEL and photodetector on a substrate14 Dec 1999US 6,001,664 ACielo Communications, Inc.
- Method for fabricating solar cell10 Jun 1997US 5,637,510 AMitsubishi Denki Kabushiki Kaisha
- Method for fabricating solar cell23 Apr 1996US 5,510,272 AMitsubishi Denki Kabushiki Kaisha
- Soft proton isolation process for an acoustic charge transport integrated circuit23 May 1995US 5,418,375 AElectronic Decisions Incorporated
No published applications in this class yet.
Most cited
By later US patents
- Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same138US 5,242,863 A1993
- Back-side hydrogenation technique for defect passivation in silicon solar cells76US 5,304,509 AMidwest Research Institute · 1994
- Method for making closely-spaced VCSEL and photodetector on a substrate74US 6,001,664 ACielo Communications, Inc. · 1999
- Method of making fault-free surface zone in semiconductor devices by step-wise heat treating73US 4,376,657 AVLSI Technology Research Association · 1983
- Radiation responsive device62US 4,062,038 AInternational Business Machines Corporation · 1977