H03H 9/462
Microelectro-mechanical filters
Official title: {Microelectro-mechanical filters}
H03H9/462 (Microelectro-mechanical filters) appears on 191 US grants and 174 published applications in this corpus.
Search patents in H03H- Granted patents
- 191
- Published applications
- 174
- Assignees
- 85
- Inventors
- 296
- Latest grant
- 26 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 4 | 8 |
| 2002 | 6 | 11 |
| 2003 | 7 | 4 |
| 2004 | 10 | 8 |
| 2005 | 8 | 3 |
| 2006 | 3 | 7 |
| 2007 | 4 | 9 |
| 2008 | 5 | 8 |
| 2009 | 9 | 8 |
| 2010 | 11 | 9 |
| 2011 | 7 | 4 |
| 2012 | 4 | 6 |
| 2013 | 8 | 4 |
| 2014 | 7 | 12 |
| 2015 | 15 | 12 |
| 2016 | 10 | 9 |
| 2017 | 9 | 14 |
| 2018 | 11 | 5 |
| 2019 | 14 | 13 |
| 2020 | 9 | 6 |
| 2021 | 2 | 4 |
| 2022 | 6 | 3 |
| 2023 | 7 | 3 |
| 2024 | 3 | 3 |
| 2025 | 2 | 1 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Steep skirt combination microelectromechanical system cavity filter and bulk acoustic wave filter26 May 2026US 12,640,705 B2Skyworks Global Pte. Ltd.
- Self-amplified resonators with embedded piezoresistive elements for high performance, ultra-low SWaP microwave and millimeter-wave applications5 Aug 2025US 12,381,512 B2National Technology & Engineering Solutions of Sandia, LLC
- Acoustic wave devices on stacked die17 Jun 2025US 12,334,899 B2Skyworks Solutions, Inc.
- MEMS resonator array arrangement29 Oct 2024US 12,132,467 B2KYOCERA Technologies Oy
- Single mode cavity filter23 Apr 2024US 11,967,748 B2Naxos Finance SA
- Silicon-supported wafer to wafer solder bond23 Oct 2025US 2025/0330149 A1Skyworks Solutions, Inc.
- Dual resonator chip3 Oct 2024US 2024/0333248 A1Kyocera Takin Oy
- Self-amplified resonators with embedded piezoresistive elements for high performance, ultra-low sw ap microwave and millimeter-wave applications16 May 2024US 2024/0162859 A1National Technology & Engineering Solutions of Sandia, LLC
- Mems resonator and mems resonator processing method9 May 2024US 2024/0154598 A1
- Acoustic wave devices on stacked die7 Sep 2023US 2023/0283255 A1Skyworks Solutions, Inc.
Most cited
By later US patents
- Q-controlled microresonators and tunable electronic filters using such resonators155US 5,491,604 AThe Regents of the University of California · 1996
- Microelectromechanical signal processor fabrication136US 5,589,082 AThe Regents of the University of California · 1996
- Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices115US 6,577,040 B2The Regents of the University of Michigan · 2003
- Microelectromechanical signal processors103US 5,455,547 AThe Regents of the University of California · 1995
- Integrated passive transceiver section102US 6,049,702 ARockwell Science Center, Inc. · 2000