Acoustic wave devices on stacked die
AssigneeSkyworks Solutions, Inc.
InventorsHiroyuki Nakamura, Rei Goto, Keiichi Maki
Life of this patent
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Abstract
Aspects of this disclosure relate to acoustic wave devices on stacked die. A first die can include first acoustic wave device configured to generate a boundary acoustic wave. A second die can include a second acoustic wave device configured to generate a second boundary acoustic wave, in which the second die is stacked with the first die. The first acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, and high acoustic velocity layers on opposing sides of the piezoelectric layer. The high acoustic velocity layers can each have an acoustic velocity that is greater than a velocity of the boundary acoustic wave.
Claims20
A boundary acoustic wave device configured to generate a boundary acoustic wave having a wavelength of A, the boundary acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer;
- high acoustic velocity layers on opposing sides of the piezoelectric layer, the high acoustic velocity layers including a first high acoustic velocity layer and a second high acoustic velocity layer, the first high acoustic velocity layer having a thickness of at least 10λ;
- and
- a low acoustic velocity layer positioned between the piezoelectric layer and one of the high acoustic velocity layers, the low acoustic velocity layer having a lower acoustic velocity than the high acoustic velocity layers.
A boundary acoustic wave device configured to generate a boundary acoustic wave, the boundary acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer;
- high acoustic velocity layers on opposing sides of the piezoelectric layer, the high acoustic velocity layers including a first high acoustic velocity layer and a second high acoustic velocity layer;
- a low acoustic velocity layer positioned between the piezoelectric layer and one of the high acoustic velocity layers, the low acoustic velocity layer having a lower acoustic velocity than the high acoustic velocity layers;
- and
- a metal layer within the low acoustic velocity layer.
A boundary acoustic wave device configured to generate a boundary acoustic wave, the boundary acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer;
- high acoustic velocity layers on opposing sides of the piezoelectric layer, the high acoustic velocity layers including a first high acoustic velocity layer and a second high acoustic velocity layer;
- a low acoustic velocity layer positioned between the piezoelectric layer and one of the high acoustic velocity layers, the low acoustic velocity layer having a lower acoustic velocity than the high acoustic velocity layers;
- and
- an adhesion layer within the low acoustic velocity layer.
An acoustic wave device assembly comprising:
- a first die including a first boundary acoustic wave device configured to generate a boundary acoustic wave having a wavelength of λ, the first boundary acoustic wave device including a piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, first and second high acoustic velocity layers on opposing sides of the piezoelectric layer, and a low acoustic velocity layer positioned between the piezoelectric layer and the first high acoustic velocity layer, the low acoustic velocity layer having a lower acoustic velocity than the first high acoustic velocity layer, and the first high acoustic velocity layer having a thickness of at least 10λ;
- and
- a second die stacked with the first die, the second die including a second boundary acoustic wave device.
Dependencies are inferred from the claim text.