H01J 2893/0063
Plasma light sources
H01J2893/0063 (Plasma light sources) appears on 10 US grants and 11 published applications in this corpus.
Search patents in H01J- Granted patents
- 10
- Published applications
- 11
- Assignees
- 9
- Inventors
- 36
- Latest grant
- 14 Jan 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 0 | 1 |
| 2005 | 1 | 0 |
| 2006 | 1 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 1 |
| 2015 | 0 | 0 |
| 2016 | 0 | 1 |
| 2017 | 1 | 0 |
| 2018 | 1 | 1 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 1 | 1 |
| 2022 | 0 | 1 |
| 2023 | 2 | 1 |
| 2024 | 1 | 2 |
| 2025 | 1 | 0 |
| 2026 | 0 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Laser-sustained plasma light source with tapered window14 Jan 2025US 12,198,921 B2KLA Corporation
- Plasma light engine24 Dec 2024US 12,176,201 B2
- Laser-sustained plasma light source with reverse vortex flow3 Oct 2023US 11,776,804 B2KLA Corporation
- Extreme ultraviolet light source apparatus and plasma position adjusting method18 Apr 2023US 11,631,579 B2Ushio Denki Kabushiki Kaisha
- Laser-pumped plasma light source and method for light generation30 Mar 2021US 10,964,523 B1Isteq B.V.
- Light-emitting sealed body1 Oct 2026US 2026/0302154 A1Hamamatsu Photonics K.K.
- Spectral range extension for laser-sustained plasma light collection28 May 2026US 2026/0148951 A1KLA Corporation
- Laser-sustained plasma light source with tapered window12 Sep 2024US 2024/0304435 A1KLA Corporation
- Pulse-assisted laser-sustained plasma in flowing high-pressure liquids28 Mar 2024US 2024/0105440 A1KLA Corporation
- Plasma light engine25 May 2023US 2023/0162968 A1
Most cited
By later US patents
- Laser driven sealed beam lamp with improved stability9US 10,008,378 B2Excelitas Technologies Corp. · 2018
- Laser-pumped plasma light source and method for light generation5US 10,964,523 B1Isteq B.V. · 2021
- Laser-sustained plasma light source with reverse vortex flow3US 11,776,804 B2KLA Corporation · 2023
- Method and apparatus for debris mitigation for an electrical discharge source1US 6,888,297 B2Euv LLC · 2005
- Method and arrangement for generating a jet of fluid, method and system for transforming the jet into a plasma, and uses of said system1US 9,642,233 B2Ecole Polytechnique · 2017