Laser-sustained plasma light source with tapered window
AssigneeKLA Corporation
InventorsIlya Bezel, Amir Torkaman
Life of this patent
Estimating the term…
Abstract
A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.
Claims29
A laser-sustained plasma broadband light source comprising:
- a gas containment structure for containing a gas;
- a laser pump source configured to generate an optical pump, wherein the laser pump source is configured to direct the optical pump into the gas containment structure to sustain a plasma within the gas containment structure, wherein the plasma generates broadband light;
- and
- a window configured to transmit a portion of the broadband light through an aperture within a wall of the gas containment structure, the window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect a portion of broadband light impinging on a peripheral portion of the window away from the of one or more portions of the gas containment structure to protect the one or more portions of the gas containment structure.
A characterization system comprising:
- a broadband light source comprising:
- a gas containment structure for containing a gas;
- a laser pump source configured to generate an optical pump, wherein the laser pump source is configured to direct the optical pump into the gas containment structure to sustain a plasma within the gas containment structure, wherein the plasma generates broadband light;
- and
- a window configured to transmit a portion of the broadband light through an aperture of the gas containment structure, the window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect a portion of light impinging on a peripheral portion of the window away from the aperture of the gas containment structure to protect one or more portions of the gas containment structure;
- a set of illumination optics configured to direct broadband light from the broadband light source to one or more samples;
- a set of collection optics configured to collect light emanating from the one or more samples;
- and
- a detector assembly.
A method of generating VUV broadband light comprising:
- containing a gas within a gas containment structure;
- generating an optical pump and directing the optical pump into the gas containment structure to sustain a plasma within the gas containment structure to generate broadband light;
- deflecting a portion of broadband light impinging on a peripheral portion of a window away from an aperture within a wall of the gas containment structure to protect one or more portions of the gas containment structure;
- and
- transmitting broadband light impinging on a center portion of the window through the aperture within a wall of the gas containment structure via the center portion of window.
Dependencies are inferred from the claim text.