Spectral range extension for laser-sustained plasma light collection

A characterization system comprising:

• a laser-sustained light source comprising:
• a gas containment structure configured to contain a pressurized gas;
• one or more pump laser sources configured to generate a pump beam;
• wherein the gas containment structure comprises:
• a body formed from a first optically transparent material transmissive to a pump laser beam;
• one or more windows formed from a material transmissive to vacuum ultraviolet light;
• one or more extension portions, wherein a respective extension portion connects the body of the gas containment structure with a respective window;
• wherein the respective window is hermetically joined to the respective extension portion to define a sealed internal gas volume;
• one or more optical elements configured to direct a pump laser beam from the pump source through the body of the gas containment structure into the sealed internal gas volume to sustain a plasma in the gas;
• and
• a light collector element configured to collect broadband light emitted by the plasma through the one or more windows,
• wherein the characterization system further comprises:
• a set of illumination optics configured to direct broadband light from the laser-sustained light source to one or more samples;
• a set of collection optics configured to collect light emanating from the one or more samples;
• and
• a detector assembly.

A method of broadband light generation comprising:

• providing a gas containment structure, the gas containment structure comprising:
• a body formed from a first optically transparent material transmissive to a pump laser beam;
• one or more windows formed from a material transmissive to vacuum ultraviolet light;
• and
• one or more extension portions, each extension portion connecting the body to a respective window transmissive to vacuum ultraviolet light, wherein each window is hermetically joined to a corresponding extension portion to define a sealed internal gas volume;
• introducing a pressurized gas into the sealed internal gas volume;
• generating a pump beam with one or more pump laser sources;
• directing the pump beam through the body into the sealed internal gas volume via one or more optical elements to ignite and sustain a plasma in the pressurized gas;
• and
• collecting broadband light emitted by the plasma through the windows using a light collector element.