Laser-sustained plasma light source with reverse vortex flow
AssigneeKLA Corporation
InventorsIlya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA Corporation
InventorsIlya Bezel, Leonid Borisovich Zvedenuk, Andrey Evgenievich Stepanov, Vitaly K. Rerikh, Boris Vasilyevich Potapkin
Estimating the term…
A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
A laser-sustained light source comprising:
A characterization system comprising:
A plasma cell comprising:
Dependencies are inferred from the claim text.