H01J 27/10
Duoplasmatrons
Official title: Duoplasmatrons {; Duopigatrons}
H01J27/10 (Duoplasmatrons) appears on 18 US grants and 9 published applications in this corpus.
Search patents in H01J- Granted patents
- 18
- Published applications
- 9
- Assignees
- 13
- Inventors
- 35
- Latest grant
- 29 Mar 2022
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 2 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 1 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 0 |
| 2008 | 1 | 1 |
| 2009 | 0 | 1 |
| 2010 | 0 | 0 |
| 2011 | 1 | 1 |
| 2012 | 0 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 2 |
| 2017 | 0 | 0 |
| 2018 | 1 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 1 |
| 2022 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Duoplasmatron ion source with a partially ferromagnetic anode29 Mar 2022US 11,289,299 B2Arizona Board of Regents on behalf of Arizona State University
- Linear anode layer slit ion source20 Nov 2018US 10,134,557 B2General Plasma, Inc.
- Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample15 Jul 2014US 8,779,400 B2Hitachi High-Technologies Corporation
- Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample9 Jul 2013US 8,481,980 B2Hitachi High-Technologies Corporation
- Ion beam system and machining method31 May 2011US 7,952,083 B2Hitachi High-Technologies Corporation
- Duoplasmatron ion source with a partially ferromagnetic anode2 Dec 2021US 2021/0375574 A1Arizona Board of Regents on behalf of Arizona State University
- Anode layer slit ion source26 May 2016US 2016/0148775 A1General Plasma, Inc.
- Linear duoplasmatron12 May 2016US 2016/0133426 A1General Plasma, Inc.
- Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample31 Oct 2013US 2013/0284593 A1Hitachi High-Technologies Corporation
- ION Beam System and Machining Method25 Aug 2011US 2011/0204225 A1
Most cited
By later US patents
- Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample88US 8,779,400 B2Hitachi High-Technologies Corporation · 2014
- Ion source having replaceable and sputterable solid source material44US 6,768,121 B2Axcelis Technologies, Inc. · 2004
- Vacuum-compatible air-cooled plasma device28US 4,659,899 AThe Perkin-Elmer Corporation · 1987
- Method and apparatus for generating ion beams25US 4,714,834 AAtomic Energy of Canada Limited · 1987
- Ion source having replaceable and sputterable solid source material21US 6,583,544 B1Axcelis Technologies, Inc. · 2003