Linear anode layer slit ion source
AssigneeGeneral Plasma, Inc.
InventorJohn E. Madocks
Life of this patent
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Abstract
A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the top pole ion emitting slit. At least one magnet creates a magnetic field that passes through the anode slit. Wherein the width of the anode slit is 3 mm or less. A process of generating an accelerated ion beam is also provided that includes flowing a gas into proximity to said anode. By energizing a power supply electron flow is induced to the anode and the gas is ionized. Accelerating the ions from the anode through the linear ion emitting slit generates an accelerated ion beam by a process superior to that using a racetrack-shaped slit.
Claims17
A system, comprising:
- a linear anode layer ion source, the linear anode layer ion source comprising:
- a top pole having a top pole ion emitting slit;
- an anode under said top pole, said anode having an anode slit aligned with the top pole ion emitting slit;
- at least one magnet to create a magnetic field comprising magnetic field lines that pass through said anode slit;
- wherein:
- the anode slit has a first end and a second end, a width less than 3 mm, and a length from the first end to the second end that is greater than or equal to 50 mm;
- and
- in operation, an ion flow flows from the top pole ion emitting slit.
A process for generating an accelerated ion beam comprising:
- flowing a gas into proximity of an anode slit of a linear anode layer ion source, the linear anode layer ion source comprising:
- a top pole having a top pole ion emitting slit;
- an anode comprising said anode slit, wherein:
- said anode is under said top pole with the anode slit aligned with the top pole ion emitting slit;
- said anode slit has a first end and a second end, a width less than 3 mm, and a length from the first end to the second end that is greater than or equal to 50 mm;
- and
- at least one magnet to generate a magnetic field comprising field lines that pass through said linear anode slit;
- energizing a power supply to induce electron flow to said anode and ionize the gas to form ions;
- and
- accelerating the ions from said anode through the top pole ion emitting slit to generate an ion flow from said top pole ion emitting slit.
Dependencies are inferred from the claim text.