G21K 5/02
Irradiation devices: having no beam-forming means
Official title: having no beam-forming means
G21K5/02 (Irradiation devices: having no beam-forming means) appears on 199 US grants and 186 published applications in this corpus.
Search patents in G21K- Granted patents
- 199
- Published applications
- 186
- Assignees
- 130
- Inventors
- 460
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 5 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 3 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 1 |
| 2002 | 0 | 0 |
| 2003 | 2 | 2 |
| 2004 | 2 | 2 |
| 2005 | 2 | 6 |
| 2006 | 3 | 4 |
| 2007 | 1 | 6 |
| 2008 | 5 | 4 |
| 2009 | 2 | 4 |
| 2010 | 3 | 7 |
| 2011 | 2 | 3 |
| 2012 | 5 | 8 |
| 2013 | 6 | 17 |
| 2014 | 16 | 11 |
| 2015 | 17 | 28 |
| 2016 | 13 | 12 |
| 2017 | 14 | 15 |
| 2018 | 14 | 7 |
| 2019 | 10 | 6 |
| 2020 | 8 | 10 |
| 2021 | 8 | 6 |
| 2022 | 9 | 8 |
| 2023 | 8 | 5 |
| 2024 | 7 | 10 |
| 2025 | 6 | 2 |
| 2026 | 4 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Charged particle beam irradiation apparatus and method of irradiation with charged particle beam187US 6,034,377 AMitsubishi Denki Kabushiki Kaisha · 2000
- Irradiation apparatus for effectively performing intermittent irradiation in synchronism with respiration94US 5,949,080 AHitachi Medical Corporation · 1999
- Process and apparatus for converged fine line electron beam treatment of objects67US 4,382,186 AEnergy Sciences Inc. · 1983
- Method for manufacturing a device, an exposure apparatus, and a method for manufacturing an exposure apparatus64US 6,266,389 B1Nikon Corporation · 2001
- Scanning systems for high resolution e-beam and X-ray lithography61US 5,424,549 ABoard of Supervisors of Louisiana State University and Agricultural and Mechanical College · 1995