G05B 2219/37224
Inspect wafer
G05B2219/37224 (Inspect wafer) appears on 129 US grants and 138 published applications in this corpus.
Search patents in G05B- Granted patents
- 129
- Published applications
- 138
- Assignees
- 61
- Inventors
- 376
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 1 |
| 2004 | 1 | 0 |
| 2005 | 0 | 4 |
| 2006 | 3 | 6 |
| 2007 | 5 | 6 |
| 2008 | 5 | 3 |
| 2009 | 6 | 11 |
| 2010 | 2 | 5 |
| 2011 | 7 | 3 |
| 2012 | 5 | 2 |
| 2013 | 2 | 2 |
| 2014 | 3 | 6 |
| 2015 | 2 | 4 |
| 2016 | 4 | 11 |
| 2017 | 10 | 6 |
| 2018 | 4 | 4 |
| 2019 | 10 | 12 |
| 2020 | 11 | 10 |
| 2021 | 8 | 15 |
| 2022 | 8 | 13 |
| 2023 | 10 | 6 |
| 2024 | 8 | 4 |
| 2025 | 13 | 3 |
| 2026 | 2 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Grid plate encoder based positioning system and method1 Sep 2026US 12,724,038 B2Nearfield Instruments B.V.
- Method and apparatus for controlling a computing process24 Mar 2026US 12,585,196 B2ASML Netherlands B. V.
- Method for improved detection of anomalous substrates in automated material-handling systems30 Dec 2025US 12,508,726 B2Hine Automation, LLC
- Method for monitoring process variation index23 Dec 2025US 12,504,696 B2Samsung Electronics Co., Ltd.
- Multicomponent module design and fabrication23 Dec 2025US 12,504,747 B2International Business Machines Corporation
- Method and machine for examining wafers19 Feb 2026US 2026/0052954 A1ASML Netherlands B. V.
- Classifying product units18 Dec 2025US 2025/0383649 A1ASML Netherlands B. V.
- Systems and methods for generating post-polishing topography for enhanced wafer manufacturing6 Nov 2025US 2025/0341824 A1GlobalWafers Co., Ltd.
- Uncertainty estimation for a position reconstruction of semiconductor components on a wafer16 Jan 2025US 2025/0020714 A1
- Positioning system and method5 Sep 2024US 2024/0295583 A1Nearfield Instruments B.V.
Most cited
By later US patents
- Device and method for manufacturing a semiconductor wafer95US 8,196,545 B2Sumco Techxiv Corporation · 2012
- Method for validating measurement data65US 9,404,743 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2016
- Systems and methods for detecting defects on a wafer and generating inspection results for the wafer56US 7,756,658 B2KLA-Tencor Corporation · 2010
- Associating data with workpieces and correlating the data with yield data39US 8,321,048 B1Advanced Micro Devices, Inc. · 2012
- Method and apparatus for production line screening38US 6,762,838 B2Tevet Process Control Technologies Ltd. · 2004