G05B 2219/32275
Job, recipe cascading: no delay, next job is started immediatly when first
Official title: Job, recipe cascading: no delay, next job is started immediatly when first is finished
G05B2219/32275 (Job, recipe cascading: no delay, next job is started immediatly when first) appears on 6 US grants and 7 published applications in this corpus.
Search patents in G05B- Granted patents
- 6
- Published applications
- 7
- Assignees
- 4
- Inventors
- 15
- Latest grant
- 17 May 2022
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 1 | 2 |
| 2005 | 2 | 0 |
| 2006 | 1 | 1 |
| 2007 | 0 | 1 |
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
| 2019 | 1 | 0 |
| 2020 | 0 | 1 |
| 2021 | 0 | 0 |
| 2022 | 1 | 0 |
By publication year.
Recent patents
- Methods and apparatus to prevent interference between processing chambers17 May 2022US 11,335,577 B2APPLIED Materials.Inc.
- Methods and apparatus to prevent interference between processing chambers8 Oct 2019US 10,438,828 B2APPLIED Materials.Inc.
- Recipe cascading in a wafer processing system30 May 2006US 7,052,919 B2ASML Holding N. V.
- Robot pre-positioning in a wafer processing system4 Oct 2005US 6,952,622 B2ASML Holding N. V.
- Robot pre-positioning in a wafer processing system8 Mar 2005US 6,865,437 B1ASML Holdings N.V.
- Methods And Apparatus To Prevent Interference Between Processing Chambers30 Jan 2020US 2020/0035527 A1APPLIED Materials.Inc.
- Methods and Apparatus to Prevent Interference Between Processing Chambers5 Apr 2018US 2018/0096871 A1APPLIED Materials.Inc.
- Vertical furnace having lot-unit transfer function and related transfer control method16 Oct 2008US 2008/0255697 A1Samsung Electronics Co., Ltd.
- System for controlling production of electronic devices, system and method for producing electronic devices, and computer program product4 Oct 2007US 2007/0233302 A1
- System for controlling a plurality of lot processes, method for controlling a plurality of lot processes and method for manufacturing a semiconductor device5 Oct 2006US 2006/0223334 A1
Most cited
By later US patents
- Recipe cascading in a wafer processing system43US 6,678,572 B1ASML Holdings N.V. · 2004
- Recipe cascading in a wafer processing system6US 7,052,919 B2ASML Holding N. V. · 2006
- Robot pre-positioning in a wafer processing system4US 6,952,622 B2ASML Holding N. V. · 2005
- Robot pre-positioning in a wafer processing system3US 6,865,437 B1ASML Holdings N.V. · 2005
- Methods and apparatus to prevent interference between processing chambers1US 10,438,828 B2APPLIED Materials.Inc. · 2019