Methods And Apparatus To Prevent Interference Between Processing Chambers

A processing chamber system controller, comprising:

• one or more connection to a subject processing chamber, a first adjacent processing chamber, a second adjacent processing chamber, a first robot in a first central transfer station or a second robot in a second central transfer station;
• a configuration to determine a start time of a first process recipe in the first adjacent process chamber, the first process recipe having a first process window in which an electromagnet is powered in the first adjacent process chamber;
• a configuration to determine a start time of a second process recipe in the second adjacent process chamber, the second process recipe having a second process window in which an electromagnet is powered in the second adjacent process chamber;
• and
• a configuration to determine a start time for a subject process recipe in a subject process chamber, the subject process recipe having a subject process window in which an electromagnet is powered in the subject process chamber, the start time of the subject process recipe determined so that there is no temporal overlap of the subject process window with the first process window of the second process window.