G05B 2219/32221
Correlation between defect and measured parameters to find origin of defect
G05B2219/32221 (Correlation between defect and measured parameters to find origin of defect) appears on 37 US grants and 48 published applications in this corpus.
Search patents in G05B- Granted patents
- 37
- Published applications
- 48
- Assignees
- 35
- Inventors
- 120
- Latest grant
- 12 Nov 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 2 |
| 2003 | 1 | 2 |
| 2004 | 3 | 3 |
| 2005 | 4 | 3 |
| 2006 | 4 | 3 |
| 2007 | 1 | 2 |
| 2008 | 1 | 3 |
| 2009 | 5 | 2 |
| 2010 | 1 | 3 |
| 2011 | 2 | 2 |
| 2012 | 0 | 1 |
| 2013 | 0 | 2 |
| 2014 | 0 | 1 |
| 2015 | 1 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 3 |
| 2018 | 0 | 3 |
| 2019 | 0 | 0 |
| 2020 | 3 | 1 |
| 2021 | 1 | 1 |
| 2022 | 2 | 3 |
| 2023 | 1 | 4 |
| 2024 | 3 | 2 |
| 2025 | 0 | 2 |
By publication year. Applications have been published since 2001.
Recent patents
- Process abnormality identification using measurement violation analysis12 Nov 2024US 12,141,230 B2APPLIED Materials.Inc.
- Data processing apparatus, data processing method, and storage medium storing program for determining an abnormality based on manufacturing data13 Aug 2024US 12,061,467 B2Kabushiki Kaisha Toshiba
- Analysis system and analysis method6 Aug 2024US 12,055,922 B2Jfe Steel Corporation
- Method for manufacturing system analysis and/or maintenance7 Mar 2023US 11,598,801 B2Arch Systems Inc.
- Process abnormality identification using measurement violation analysis1 Nov 2022US 11,487,848 B2APPLIED Materials.Inc.
- Classifying product units18 Dec 2025US 2025/0383649 A1ASML Netherlands B. V.
- Finding possible technical causes of or solutions for malfunctions of a production cell6 Feb 2025US 2025/0044777 A1Engel Austria GmbH
- Defect profiling and tracking system for process-manufacturing enterprise13 Jun 2024US 2024/0192668 A1Noodle Analytics, Inc.
- Methods, apparatus, and articles of manufacture to identify causes of defects in industrial environments28 Mar 2024US 2024/0103506 A1Intel Corporation
- Data processing apparatus, method, and storage medium3 Aug 2023US 2023/0244210 A1Kabushiki Kaisha Toshiba
Most cited
By later US patents
- Method for controlling a semiconductor manufacturing process by failure analysis feedback79US 5,923,553 ASamsung Electronics Co., Ltd. · 1999
- Method of virtual machining to predict the accuracy of part to be made with machine tools75US 5,691,909 AWestern Atlas, Inc. · 1997
- Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework46US 6,725,402 B1Advanced Micro Devices, Inc. · 2004
- Method and apparatus for analyzing correlation for semiconductor chips29US 6,289,257 B1Fujitsu Limited · 2001
- Defect reference system automatic pattern classification29US 6,466,895 B1APPLIED Materials.Inc. · 2002