G02B 7/195
Fluid-cooled mirrors
Official title: Fluid-cooled mirrors {(not in use, see G02B7/181)}
G02B7/195 (Fluid-cooled mirrors) appears on 4 US grants and 6 published applications in this corpus.
Search patents in G02B- Granted patents
- 4
- Published applications
- 6
- Assignees
- 5
- Inventors
- 13
- Latest grant
- 7 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 0 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 4 |
| 2023 | 0 | 0 |
| 2024 | 0 | 0 |
| 2025 | 2 | 1 |
By publication year.
Recent patents
- Projection exposure apparatus for semiconductor lithography7 Oct 2025US 12,436,361 B2Carl Zeiss SMT GmbH
- Optical device with thermally conductive fingers and related method26 Aug 2025US 12,399,346 B2University of Central Florida Research Foundation, Inc.
- Lightweight adaptive metal cooled mirrors23 Jul 2019US 10,359,603 B1Board of Trustees of the University of Alabama, for and on behalf of the University of Alabama in Huntsville
- Mirror with a mirror carrier and projection exposure apparatus9 Sep 2014US 8,831,170 B2Carl Zeiss SMT GmbH
- Optical device with thermally conductive fingers and related method20 Nov 2025US 2025/0355221 A1University of Central Florida Research Foundation, Inc.
- Projection exposure apparatus for semiconductor lithography22 Sep 2022US 2022/0299733 A1Carl Zeiss SMT GmbH
- Optical Element Mounting Method11 Aug 2022US 2022/0252872 A1Nippon Telegraph and Telephone Corporation
- Assembly in an optical system, in particular of a microlithographic projection exposure apparatus7 Jul 2022US 2022/0214627 A1
- Optical device with thermally conductive fingers and related method21 Apr 2022US 2022/0121002 A1University of Central Florida Research Foundation, Inc.
Most cited
By later US patents