Mirror with a mirror carrier and projection exposure apparatus
AssigneeCarl Zeiss SMT GmbH
InventorsRutger Wevers, Andreas Seifert, Joachim Hartjes, Guenther Dengel
Life of this patent
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Abstract
A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.
Claims31
An apparatus, comprising:
- a mirror carrier having at least one cooling channel, the mirror carrier comprising a crystalline material;
- a tube connection comprising a metallic material, the tube connection being configured to be capable of connecting the at least one cooling channel to an inlet of coolant or an outlet of coolant, and the tube connection having an external thread screwed into a corresponding thread hole in the mirror carrier;
- and
- a sealing element configured to be capable of providing a gas-tight and liquid-tight seal, the sealing element being arranged between the tube connection and the mirror carrier.
An apparatus, comprising:
- a light source;
- and
- a projection objective configured to be used in EUV lithography, the projection objective comprising:
- mirrors,
- a mirror carrier configured to be used with one of the mirrors;
- first and second tube connections;
- and
- first and second sealing elements,
- wherein:
- the mirror carrier is configured as a cooling device with at least one cooling channel;
- the first tube connection is configured to be capable of connecting the at least one cooling channel to an inlet of coolant;
- the second tube connection is configured to be capable of connection the at least one cooling channel to an outlet of coolant;
- the first sealing element is configured to be capable of providing a gas-tight and liquid-tight seal between the first tube connection and the mirror carrier;
- the second sealing element is configured to be capable of providing a gas-tight and liquid-tight seal between the second tube connection and the mirror carrier;
- and
- the apparatus is a projection exposure apparatus.
An apparatus, comprising:
- a non-metallic mirror carrier having at least one thread;
- and
- a metallic connecting element that engages into the at least one thread via a counterthread,
- wherein at least the thread or the counterthread is coated with a soft metal.
An apparatus, comprising:
- a mirror carrier with at least one cooling channel;
- a tube connection comprising a metallic material configured to be capable of connecting the at least one cooling channel to an inlet of coolant or an outlet of coolant;
- and
- solder having a low melting point, the solder connecting the first tube connection to the mirror carrier.
An apparatus, comprising:
- a mirror carrier with at least one cooling channel;
- and
- a tube connection configured to be capable of connecting the at least one cooling channel to an inlet of coolant or an outlet of coolant, the tube connection being surrounded by cutouts for stress relief at least in regions in the vicinity of its periphery.
An apparatus, comprising:
- a mirror carrier with at least one cooling channel;
- and
- a tube connection configured to be capable of connecting the at least one cooling channel to an inlet of coolant or an outlet of coolant, at least one part of the tube connection projecting into the mirror carrier and having a mechanism for stress relief.
An apparatus, comprising:
- a mirror configured to be used in an EUV projection exposure apparatus;
- a non-metallic mirror carrier with at least one cooling channel, the non-metallic mirror carrier comprising a first material;
- a tube connection comprising a second material different from the first material,
- wherein the tube connection is connected to the non-metallic mirror carrier via a connection that is high-vacuum-tight and radiation-resistant to light in the wavelength range of from 1 nm to 100 nm.
Dependencies are inferred from the claim text.