G02B 6/3692
With surface micromachining involving etching
Official title: {with surface micromachining involving etching, e.g. wet or dry etching steps (surface micromachining involving subtractive techniques B81C1/00055)}
G02B6/3692 (With surface micromachining involving etching) appears on 446 US grants and 341 published applications in this corpus.
Search patents in G02B- Granted patents
- 446
- Published applications
- 341
- Assignees
- 227
- Inventors
- 872
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 5 | 0 |
| 1989 | 8 | 0 |
| 1990 | 11 | 0 |
| 1991 | 4 | 0 |
| 1992 | 7 | 0 |
| 1993 | 6 | 0 |
| 1994 | 6 | 0 |
| 1995 | 9 | 0 |
| 1996 | 12 | 0 |
| 1997 | 11 | 0 |
| 1998 | 12 | 0 |
| 1999 | 14 | 0 |
| 2000 | 13 | 0 |
| 2001 | 9 | 6 |
| 2002 | 28 | 55 |
| 2003 | 44 | 75 |
| 2004 | 49 | 54 |
| 2005 | 38 | 26 |
| 2006 | 33 | 25 |
| 2007 | 25 | 15 |
| 2008 | 10 | 4 |
| 2009 | 17 | 9 |
| 2010 | 4 | 6 |
| 2011 | 7 | 5 |
| 2012 | 3 | 3 |
| 2013 | 3 | 7 |
| 2014 | 6 | 4 |
| 2015 | 3 | 4 |
| 2016 | 7 | 10 |
| 2017 | 8 | 6 |
| 2018 | 5 | 4 |
| 2019 | 3 | 2 |
| 2020 | 2 | 3 |
| 2021 | 1 | 3 |
| 2022 | 4 | 2 |
| 2023 | 3 | 5 |
| 2024 | 5 | 1 |
| 2025 | 3 | 5 |
| 2026 | 3 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electro-optical interconnect platform4 Aug 2026US RE50,979 E1Teramount Ltd.
- Receptacle for a light guide bundle, method and intermediate product for the production thereof2 Jun 2026US 12,645,038 B2Schott AG
- Approach to prevent plating at v-groove zone in photonics silicon during bumping or pillaring5 May 2026US 12,619,038 B2Intel Corporation
- Passively-aligned fiber array to waveguide configuration21 Oct 2025US 12,449,603 B2Aayuna Inc.
- Structure and method for testing of PIC with an upturned mirror22 Jul 2025US 12,366,603 B1POET Technologies, Inc.
- Optical interfacing device with an array of tapered optical fibers30 Jul 2026US 2026/0219448 A1IonQ, Inc.
- Optical device and method of manufacture5 Feb 2026US 2026/0036769 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Fiber-waveguide coupler and method for manufacturing11 Dec 2025US 2025/0377504 A1LiGenTec SA
- Structure and method for testing of pic with an upturned mirror13 Nov 2025US 2025/0347741 A1POET Technologies, Inc.
- Fiber-Waveguide Coupler and method for manufacturing3 Jul 2025US 2025/0216615 A1
Most cited
By later US patents
- Silicon substrate having a recess for receiving an element, and a method of producing such a recess526US 6,482,663 B1Telefonaktiebolaget LM Ericsson (publ) · 2002
- Method of making an integrated, microminiature electric-to-fluidic valve283US 4,966,646 AThe Board of Trustees of the Leland Stanford University · 1990
- Structure for micro-machine optical tooling and method for making and using166US 6,049,650 ASeagate Technology LLC · 2000
- Integrated, microminiature electric to fluidic valve and pressure/flow regulator162US 4,943,032 AStanford University · 1990
- Optoelectronic packaging106US 6,456,766 B1Cornell Research Foundation, Inc. · 2002