G02B 6/3584
Constructional details of an associated actuator having a mems construction, i.e. constructed
Official title: {constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching (MEMS per se B81B, B81C)}
G02B6/3584 (Constructional details of an associated actuator having a mems construction, i.e. constructed) appears on 553 US grants and 489 published applications in this corpus.
Search patents in G02B- Granted patents
- 553
- Published applications
- 489
- Assignees
- 262
- Inventors
- 982
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 3 | 0 |
| 1994 | 4 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 5 | 0 |
| 2000 | 8 | 0 |
| 2001 | 18 | 21 |
| 2002 | 50 | 95 |
| 2003 | 75 | 78 |
| 2004 | 90 | 59 |
| 2005 | 61 | 70 |
| 2006 | 67 | 37 |
| 2007 | 29 | 16 |
| 2008 | 25 | 11 |
| 2009 | 10 | 6 |
| 2010 | 14 | 5 |
| 2011 | 5 | 4 |
| 2012 | 6 | 8 |
| 2013 | 4 | 1 |
| 2014 | 4 | 6 |
| 2015 | 4 | 9 |
| 2016 | 9 | 3 |
| 2017 | 4 | 5 |
| 2018 | 7 | 10 |
| 2019 | 10 | 7 |
| 2020 | 6 | 12 |
| 2021 | 10 | 5 |
| 2022 | 3 | 4 |
| 2023 | 5 | 1 |
| 2024 | 4 | 3 |
| 2025 | 4 | 9 |
| 2026 | 1 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Beam scanning methods for improved eye safety in LiDAR systems25 Feb 2025US 12,235,362 B2The Charles Stark Draper Laboratory, Inc.
- Integrated optical circuit having switch devices electrically connected by through-substrate via17 Sep 2026US 2026/0276898 A1nEYE Systems, Inc.
- Photonic wire bonding methods and processes for the advanced packaging of photonic devices and systems2 Jul 2026US 2026/0184628 A1Aeponyx Inc.
- Photonic wire bonding methods and processes for the advanced packaging of photonic devices and systems2 Jul 2026US 2026/0184629 A1Aeponyx Inc.
- Optical array with self-aligned collimated fibers and mems mirrors1 Jan 2026US 2026/0003129 A1Omnitron Sensors Inc.
- Dual layer optical switch27 Nov 2025US 2025/0362460 A1nEYE Systems, Inc.
Most cited
By later US patents
- Photonic mems and structures872US 6,650,455 B2Iridigm Display Corporation · 2003
- Photonic MEMS and structures616US 7,123,216 B1Idc, LLC · 2006
- Digital micromirror shutter device386US 5,226,099 ATexas Instruments Incorporated · 1993
- Multi-wavelength cross-connect optical switch282US 6,097,859 AThe Regents of the University of California · 2000
- Photonic MEMS and structures207US 7,110,158 B2Idc, LLC · 2006