Rotational and translational micropositioners using deformable microelectromechanical systems
OwnerSeyedfakhreddin Nabavi, Michael Menard +1inventors
InventorsSeyedfakhreddin Nabavi, Michael Menard, Frederic Nabki
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Abstract
Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.
Claims13
A microelectromechanical systems (MEMS) device comprising:
- an anchor beam coupled to a first portion of a comb drive having an end anchored to a substrate upon which the MEMS device is formed on one side of the first portion of the comb drive and another distal end anchored to the substrate on another side of the first portion of the comb drive opposite the one side;
- and
- a structure comprising
- the comb drive comprising the first portion and a second portion, the first portion and second portion providing a set of interdigitated fingers;
- a support beam coupled at one end to the second portion of the comb drive and at another distal end coupled to a moveable plate;
- and
- the moveable plate suspended from the substrate;
- wherein
- activation of the comb drive in a direction pushes the first portion of the comb drive attached to the anchor beam away from the moveable plate inducing rotation of the structure and anchor beam in another direction and thereby motion of the moveable plate in a further direction;
- and
- activation of the comb drive in another direction opposite the first direction pulls the first portion of the comb drive attached to the anchor beam towards the moveable plate inducing rotation of the structure and anchor beam in a direction opposite that of the other direction and thereby motion of the moveable plate in a direction opposite that of the further direction.
A microelectromechanical systems (MEMS) device comprising:
- an anchor coupled to a first portion of a comb drive anchored to a substrate upon which the MEMS device is formed;
- and
- a structure comprising:
- a comb drive comprising a first portion and a second portion, the first portion and second portion providing a set of interdigitated fingers;
- and
- a support beam coupled at one end to the second portion of the comb drive and at another distal end coupled to a moveable plate;
- and
- the moveable plate suspended from the substrate;
- wherein
- activation of the comb drive in a direction pushes the first portion of the comb drive attached to the anchor beam away from the moveable plate inducing rotation of the structure and anchor in another direction and thereby motion of the moveable plate in a further direction;
- and
- activation of the comb drive in another direction opposite the first direction pulls the first portion of the comb drive attached to the anchor beam towards the moveable plate inducing rotation of the structure and anchor in a direction opposite that of the other direction and thereby motion of the moveable plate in a direction opposite that of the further direction.
Dependencies are inferred from the claim text.