US 2026/0003129 A1 · OPTICAL ARRAY WITH SELF-ALIGNED COLLIMATED FIBERS AND MEMS MIRRORS

Abstract

An optical switching array having multiple cells of MEMs optical switching units and methods of fabricating the array is disclosed. The switching unit includes a spacer structure having an enclosed light cavity. The light cavity is defined by a first end structure, a second end structure, and side structures each attached between the first and second end structure. A first input optical fiber array is attached to a top surface over the light cavity in proximity to the first end structure. A first mirror array is attached to a bottom surface over the light cavity in proximity to the first end structure. A second mirror array is attached to the top surface over the light cavity in proximity to the second end structure. An output optical fiber array is attached to the bottom surface over the light cavity in proximity to the second end structure.

Claims20

Dependent claims

An optical switching unit comprising:

a spacer structure having an enclosed light cavity defined by a first end structure, a second end structure, and side structures each attached between the first and second end structure, a top surface surrounding the light cavity, and a bottom surface surrounding the light cavity, wherein the light cavity extends between top surface and the bottom surface;
a first input optical fiber array attached to the top surface over the light cavity in proximity to the first end structure;
a first mirror array attached to the bottom surface over the light cavity in proximity to the first end structure, wherein mirrors of the first mirror array are spatially aligned with optical fibers of the input optical fiber input array;
a second mirror array attached to the top surface over the light cavity in proximity to the second end structure;
and
an output optical fiber array attached to the bottom surface over the light cavity in proximity to the second end structure, wherein optical fibers of the output optical fiber array are spatially aligned with mirrors of the second mirror array.

3 more elements

A method of fabricating an optical switch comprising:

forming a spacer structure having a first end structure, a second end structure, and side structures from a substrate, wherein the first end structure, second end structure, and side structures define a top surface and a bottom surface and an enclosed light cavity;
attaching a first mirror array to the bottom surface to partially cover the light cavity;
attaching a first input optical fiber array to the top surface to partially cover the light cavity, wherein fibers of the input fiber array are spatially aligned to mirrors of the first mirror array;
attaching a second mirror array to the top surface to partially cover the light cavity;
and
attaching a second output optical fiber array to the bottom surface to partially cover the light cavity, wherein fibers of the second output optical fiber array are spatially aligned to mirrors of the second mirror array.

3 more elements

Dependencies are inferred from the claim text.

Optical array with self-aligned collimated fibers and mems mirrors

Life of this patent

Optical array with self-aligned collimated fibers and mems mirrors

Life of this patent

Abstract

Claims20