G02B 6/3518
The reflective optical element being an intrinsic part of a mems device
Official title: {the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833)}
G02B6/3518 (The reflective optical element being an intrinsic part of a mems device) appears on 529 US grants and 490 published applications in this corpus.
Search patents in G02B- Granted patents
- 529
- Published applications
- 490
- Assignees
- 229
- Inventors
- 902
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 5 | 0 |
| 2000 | 7 | 0 |
| 2001 | 17 | 16 |
| 2002 | 41 | 56 |
| 2003 | 57 | 63 |
| 2004 | 70 | 40 |
| 2005 | 47 | 39 |
| 2006 | 42 | 24 |
| 2007 | 27 | 13 |
| 2008 | 15 | 6 |
| 2009 | 8 | 14 |
| 2010 | 8 | 12 |
| 2011 | 10 | 5 |
| 2012 | 11 | 7 |
| 2013 | 6 | 11 |
| 2014 | 10 | 7 |
| 2015 | 12 | 22 |
| 2016 | 25 | 18 |
| 2017 | 15 | 19 |
| 2018 | 13 | 13 |
| 2019 | 13 | 6 |
| 2020 | 13 | 26 |
| 2021 | 15 | 18 |
| 2022 | 15 | 8 |
| 2023 | 11 | 16 |
| 2024 | 7 | 11 |
| 2025 | 5 | 10 |
| 2026 | 3 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Optical switching apparatus324US 6,295,154 B1Texas Instruments Incorporated · 2001
- Multi-wavelength cross-connect optical switch282US 6,097,859 AThe Regents of the University of California · 2000
- Micromechanical optical switch202US 6,407,851 B12002
- Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof190US 6,363,183 B12002
- Piezoelectric actuated optical switch151US 6,807,332 B1Western Digital (Fremont), LLC · 2004