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US 12,724,228 B2Granted
Moveable mirror and optical circuit switch
AssigneeCalient.Ai Inc.
InventorScott A. Miller
Life of this patent
Estimating the term…
Abstract
Methods, apparatuses, and methods of manufacture are described that provide one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended which reduces moment of inertia during use.
Claims27
A moveable mirror, comprising:
- a stationary frame including a cavity;
- a movable frame disposed in the cavity;
- a central stage disposed in the cavity, the central stage being configured to tilt or rotate about an axis;
- and
- a mirror disposed on the central stage, wherein the central stage comprises
- an un-recessed portion having a first finite thickness, and
- a plurality of recessed areas adjacent to the un-recessed portion, each of the plurality of recessed areas having a second finite thickness that is less than the first finite thickness, wherein the un-recessed portion comprises
- a first un-recessed segment extending in a first direction and having a first uniform width, wherein the first direction extends along the axis, and
- a second un-recessed segment extending in a second direction and having a second uniform width,
- wherein the first un-recessed segment and the second un-recessed segment intersect perpendicularly.
7 more elements
A moveable mirror, comprising:
- a first cover;
- a second cover;
- a device wafer disposed between the first cover and the second cover, the device wafer comprising a cavity;
- a central stage disposed in the cavity and configured to tilt about an axis;
- a first surface of the central stage, the first surface comprising
- a recessed area having a first finite thickness and including a plurality of recessed section, and
- an un-recessed area having a second finite thickness greater than the first finite thickness, the un-recessed area including a plurality of un-recessed portions interspersed between the recessed sections,
- wherein the un-recessed portions form a symmetrically or substantially symmetrically pattern dividing the recessed area,
- wherein the un-recessed area comprises
- a first un-recessed portion extending in a first direction and having a first uniform width, wherein the first direction extends along the axis,
- a second un-recessed portion extending in a second direction and having a second uniform width, wherein the first un-recessed portion and the second un-recessed portion intersect perpendicularly, and
- a mirror disposed on a second surface of the central stage, the second surface opposing the first surface.
9 more elements
Dependencies are inferred from the claim text.