Micromechanical optical switch
OwnerMohammed N. Islam, Amos Kuditcherinventors
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Abstract
An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
Claims74
An optical switch element comprising:
- a fixed layer disposed outwardly from a substrate;
- and
- a movable mirror assembly disposed outwardly from the fixed layer and operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly, the movable mirror assembly comprising:
- an inner strip spaced apart from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance, wherein the optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
An optical switch element, comprising:
- a fixed mirror layer disposed outwardly from a substrate;
- and
- a movable mirror assembly comprising an inner mirror strip and an outer mirror strip disposed approximately adjacent to and outwardly from the inner mirror strip;
- wherein the fixed mirror layer and the movable mirror assembly define a Fabry-Perot interference cavity, the movable mirror assembly operable to move with respect to the fixed mirror layer to change the reflective or transmissive qualities of the switch element.
An optical switch element, comprising:
- a fixed layer disposed outwardly from a substrate;
- and
- a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in the transmissive characteristics of the optical cavity;
- wherein the optical switch element is operable to switch between a substantially transmissive state and a less than substantially transmissive state at a rate optimized for a specified packet size.
A method of forming an optical switch element, the method comprising:
- forming a fixed layer outwardly from a substrate;
- forming a movable mirror assembly outwardly from the fixed layer, the movable mirror assembly comprising:
- an inner strip disposed outwardly from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance, wherein the optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
A method of communicating optical signals, comprising:
- receiving an optical signal at an optical switch element having a fixed layer and a moveable mirror assembly disposed outwardly from the fixed layer, the moveable mirror assembly comprising:
- an inner strip spaced apart from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance;
- applying a voltage to the moveable mirror assembly to change its position relative to the fixed layer and cause a change in the optical transmission of the optical switch element.
An array of optical switch elements operable to switch optical signals depending on a voltage applied to the switch element, at least one of the optical switch elements, comprising:
- a fixed layer disposed outwardly from a substrate;
- and
- a movable mirror assembly disposed outwardly from the fixed layer and operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly, the movable mirror assembly comprising:
- an inner strip spaced apart from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance, wherein the optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
An optical switch comprising a Mach-Zender interferometer comprising:
- an optical switch element including:
- a fixed layer disposed outwardly from a substrate;
- and
- a movable mirror assembly disposed outwardly from the fixed layer and operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly, the movable mirror assembly comprising:
- an inner strip spaced apart from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance, wherein the optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
An electro-optic router operable to receive a plurality of optical signals and to switch the optical signals using an array of optical switch elements, at least one of the optical switch elements comprising:
- a fixed layer disposed outwardly from a substrate;
- and
- a movable mirror assembly disposed outwardly from the fixed layer and operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly, the movable mirror assembly comprising:
- an inner strip spaced apart from the fixed layer by a first distance;
- and
- an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance, wherein the optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
Dependencies are inferred from the claim text.