Piezoelectric actuated optical switch
AssigneeWestern Digital (Fremont), LLC
InventorMuhammad A. Hawwa
Life of this patent
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Abstract
An optical switching component comprises a rotor with a reflective top surface pivotally mounted within a stator, and a piezoelectric actuator set between the rotor and the stator to move the rotor about the pivot point. A controller can also be joined to the piezoelectric actuator to effectuate actuation thereof. Two light ports can also be set proximate to the reflective top surface such that a beam of light emitted from one is reflected to the other. Multiple optical switching components can be arranged to form an optical switching device. Optical switching components and devices can be fabricated according to conventional microfabrication practices including film deposition, planarization, and photolithography techniques.
Claims13
A method for making an optical switching component comprising:
- providing a substrate;
- forming a stator by defining a cavity within the substrate;
- forming a mask layer over the stator and filling the cavity;
- forming an opening in the mask layer;
- forming within the opening a rotor and a pivotal connection to the stator;
- removing the mask layer;
- and
- forming a piezoelectric actuator between the stator and the rotor.
A method for making an optical switching component comprising:
- providing a substrate;
- forming a stator from the substrate by defining a cavity within the substrate;
- forming a mask layer over the stator, the mask layer filling the cavity;
- forming an opening in the mask layer;
- forming within the opening a rotor and a pivotal connection between the rotor and the stator;
- removing the mask layer;
- and
- forming a piezoelectric actuator between the stator and the rotor.
Dependencies are inferred from the claim text.