G02B 5/1838
For use with ultraviolet radiation or x-rays
Official title: {for use with ultraviolet radiation or X-rays}
G02B5/1838 (For use with ultraviolet radiation or x-rays) appears on 110 US grants and 131 published applications in this corpus.
Search patents in G02B- Granted patents
- 110
- Published applications
- 131
- Assignees
- 83
- Inventors
- 345
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 1 |
| 2002 | 0 | 6 |
| 2003 | 4 | 4 |
| 2004 | 8 | 9 |
| 2005 | 2 | 10 |
| 2006 | 4 | 5 |
| 2007 | 6 | 4 |
| 2008 | 2 | 0 |
| 2009 | 3 | 6 |
| 2010 | 0 | 4 |
| 2011 | 2 | 2 |
| 2012 | 5 | 2 |
| 2013 | 2 | 6 |
| 2014 | 3 | 8 |
| 2015 | 3 | 5 |
| 2016 | 6 | 6 |
| 2017 | 7 | 5 |
| 2018 | 8 | 9 |
| 2019 | 7 | 9 |
| 2020 | 12 | 7 |
| 2021 | 5 | 3 |
| 2022 | 0 | 8 |
| 2023 | 4 | 4 |
| 2024 | 5 | 3 |
| 2025 | 4 | 2 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Fabrication of binary-phase photon sieve1 Sep 2026US 12,724,182 B1United States of America as represented by the Administrator of NASA
- Transmissive diffraction grating2 Jun 2026US 12,645,017 B2ASML Netherlands B. V.
- Illumination optical system for EUV projection lithography11 Nov 2025US 12,468,228 B2Carl Zeiss SMT GmbH
- Optical element for a EUV projection exposure system2 Sep 2025US 12,406,777 B2Carl Zeiss SMT GmbH
- Curved reticle by mechanical and phase bending along orthogonal axes1 Jul 2025US 12,346,029 B2Nikon Corporation
- Tpu high and low temperature film with optical color effect and preparation method thereof30 Apr 2026US 2026/0118552 A1Guangdong Zhongding Technology Development Co., Ltd.
- Blazed grating based reflective spectral purity filter for euv imaging systems19 Feb 2026US 2026/0050112 A1KLA Corporation
- Viewport assembly for an extreme ultraviolet light source1 Jan 2026US 2026/0003298 A1ASML Netherlands B. V.
- Euv collector25 Sep 2025US 2025/0298175 A1
- Mirror for a projection exposure apparatus1 May 2025US 2025/0138228 A1
Most cited
By later US patents
- Multilayer diffraction grating118US 4,915,463 AThe United States of America as represented by the Department of Energy · 1990
- Diffractoid grating configuration for X-ray and ultraviolet focusing46US 4,192,994 AThe United States of America as represented by the Administrator of the National Aeronautics and Space Administration · 1980
- Aplanatic and quasi-aplanatic diffraction gratings45US 4,798,446 AThe United States of America as represented by the United States Department of Energy · 1989
- Large field of view grating interferometers for X-ray phase contrast imaging and CT at high energy45US 9,329,141 B2The Johns Hopkins University · 2016
- System and method for phase-contrast X-ray imaging39US 9,439,613 B2The Johns Hopkins University · 2016