G01P 2015/0874
Using means for preventing stiction of the seismic mass to the substrate
Official title: {using means for preventing stiction of the seismic mass to the substrate}
G01P2015/0874 (Using means for preventing stiction of the seismic mass to the substrate) appears on 43 US grants and 64 published applications in this corpus.
Search patents in G01P- Granted patents
- 43
- Published applications
- 64
- Assignees
- 23
- Inventors
- 86
- Latest grant
- 31 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2012 | 0 | 2 |
| 2013 | 0 | 3 |
| 2014 | 2 | 4 |
| 2015 | 0 | 5 |
| 2016 | 2 | 2 |
| 2017 | 3 | 5 |
| 2018 | 1 | 4 |
| 2019 | 5 | 2 |
| 2020 | 5 | 4 |
| 2021 | 1 | 6 |
| 2022 | 6 | 5 |
| 2023 | 6 | 6 |
| 2024 | 5 | 8 |
| 2025 | 5 | 5 |
| 2026 | 2 | 3 |
By publication year. 2026 runs to 8 Oct.
Recent patents
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- Physical quantity sensor and inertial measurement unit5 Aug 2025US 12,379,390 B2Seiko Epson Corporation
- Microelectromechanical acceleration sensor5 Mar 2026US 2026/0062281 A1Robert Bosch GmbH
- Microelectromechanical sensor component and microelectromechanical inertial sensor26 Feb 2026US 2026/0056226 A1
- 3-axis angular accelerometer15 Jan 2026US 2026/0016500 A1Analog Devices, Inc.
- Mems sensor having a high robustness against the stiction phenomenon7 Aug 2025US 2025/0250156 A1STMicroelectronics International N. V.
- Mass deflection self-testing of a mems accelerometer31 Jul 2025US 2025/0244357 A1Murata Manufacturing Co., Ltd.
Most cited
By later US patents
- 3-axis angular accelerometer13US 10,585,111 B2Analog Devices, Inc. · 2020
- 3-axis angular accelerometer4US 11,313,876 B2Analog Devices, Inc. · 2022
- Elastic bump stops for MEMS devices3US 10,527,420 B2InvenSense, Inc. · 2020
- MEMS device and method of manufacturing MEMS device3US 8,643,927 B2Hitachi, Ltd. · 2014
- Semi-flexible proof-mass2US 10,190,938 B2Murata Manufacturing Co., Ltd. · 2019