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US 12,504,440 B2Granted
Low stress overtravel stop
AssigneeInvenSense, Inc.
InventorsMatthew Julian Thompson, Robert Walmsley
Life of this patent
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Abstract
A microelectromechanical system device is described. The microelectromechanical system device can comprise: a proof mass coupled to an anchor via a spring, wherein the proof mass moves in response to an imposition of an external load to the proof mass, and an overtravel stop comprising a first portion and a second portion.
Claims8
A microelectromechanical system device, comprising:
- a first proof mass coupled to an anchor via a first spring,
- a second proof mass coupled to the first proof mass via a second spring,
- wherein the first proof mass and the second proof mass move in response to an imposition of an external load;
- and
- an overtravel stop comprising a first portion and a second portion, wherein the second proof mass contacts the first portion of the overtravel stop and the second proof mass is disengaged from the second portion of the overtravel stop in response the external load being above a first threshold value and below a second threshold value, and wherein the first portion of the overtravel stop is contiguous with and abuts the second portion of the overtravel stop.
2 more elements
Dependencies are inferred from the claim text.