3-axis angular accelerometer
AssigneeAnalog Devices, Inc.
InventorsXin Zhang, Jianglong Zhang, Alan O'Donnell
Life of this patent
Estimating the term…
Abstract
Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.
Claims15
A fluidic sensor comprising:
- a channel that is part of the fluidic sensor;
- a corrugated region formed in the channel and configured to create turbulence in a fluid flowing in the channel;
- an inertial sensor disposed in proximity to the corrugated region and configured to detect motion of the fluid caused by the turbulence;
- and
- read-out circuitry configured to determine a viscosity of the fluid based on the detected motion.
A fluidic sensor comprising:
- a channel that is part of the fluidic sensor;
- a corrugated region formed in the channel and configured to create turbulence in a fluid flowing in the channel;
- an angular accelerometer disposed in proximity to the corrugated region, the angular accelerometer being configured to detect angular motion of the fluid flowing in the channel, and
- read-out circuitry configured to determine a viscosity of the fluid based on the detected angular motion.
A fluidic sensor comprising:
- a channel that is part of the fluidic sensor;
- a corrugated region formed in the channel and configured to create turbulence in a fluid flowing in the channel;
- an inertial sensor disposed in proximity to the corrugated region and configured to detect motion of the fluid caused by the turbulence;
- read-out circuitry configured to determine a viscosity of the fluid based on the detected motion;
- and
- a wireless input/output (I/O) interface configured to transmit data indicative of the viscosity to an external device.
Dependencies are inferred from the claim text.