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G01N 2021/335

Vacuum uv

Official title: {Vacuum UV}

G01N2021/335 (Vacuum uv) appears on 47 US grants and 52 published applications in this corpus.

Search patents in G01N

Granted patents: 47
Published applications: 52
Assignees: 32
Inventors: 72
Latest grant: 1 Sep 2026

Filings by year

G01N 2021/335: granted patents and published applications per publication year
Year	Granted patents	Published applications
1989	1	0
1990	0	0
1991	0	0
1992	0	0
1993	1	0
1994	0	0
1995	0	0
1996	0	0
1997	0	0
1998	0	0
1999	0	0
2000	0	0
2001	0	0
2002	0	0
2003	0	0
2004	0	0
2005	0	1
2006	1	2
2007	3	1
2008	2	1
2009	0	1
2010	1	5
2011	2	0
2012	1	1
2013	0	1
2014	3	3
2015	2	1
2016	2	2
2017	1	3
2018	2	1
2019	3	8
2020	5	5
2021	1	3
2022	3	4
2023	5	4
2024	4	1
2025	2	3
2026	2	1

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

Recent patents

Flow cells and methods for analyzing liquids at vacuum ultraviolet (VUV) wavelengths1 Sep 2026US 12,723,972 B2VUV Analytics, Inc.
Spectroscopy systems and methods for analyzing liquids at vacuum ultraviolet (VUV) wavelengths27 Jan 2026US 12,535,408 B2VUV Analytics, Inc.
EUV light generation apparatus, electronic device manufacturing method, and inspection method28 Oct 2025US 12,455,231 B2Gigaphoton Inc.
Integration of an optical height sensor in mask inspection tools15 Jul 2025US 12,360,058 B2KLA Corporation
Apparatus and method for element analysis of materials by means of optical emission spectroscopy27 Aug 2024US 12,072,291 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.

Most cited

By later US patents